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Super-Resolution Fluorescence Imaging for Semiconductor Nanoscale Metrology and Inspection.
Nguyen, Duyen Thi; Mun, Seohyun; Park, HyunBum; Jeong, Uidon; Kim, Geun-Ho; Lee, Seongsil; Jun, Chung-Sam; Sung, Myung Mo; Kim, Doory.
Afiliação
  • Nguyen DT; Department of Chemistry, Hanyang University, Seoul 04763, Republic of Korea.
  • Mun S; Department of Chemistry, Hanyang University, Seoul 04763, Republic of Korea.
  • Park H; Department of Chemistry, Hanyang University, Seoul 04763, Republic of Korea.
  • Jeong U; Department of Chemistry, Hanyang University, Seoul 04763, Republic of Korea.
  • Kim GH; Department of Chemistry, Hanyang University, Seoul 04763, Republic of Korea.
  • Lee S; Advanced Manufacturing Engineering Team, Semiconductor R&D Center, Samsung Electronics, Hwaseong-si, Gyeonggi-do 18448, Republic of Korea.
  • Jun CS; Advanced Manufacturing Engineering Team, Semiconductor R&D Center, Samsung Electronics, Hwaseong-si, Gyeonggi-do 18448, Republic of Korea.
  • Sung MM; Department of Chemistry, Hanyang University, Seoul 04763, Republic of Korea.
  • Kim D; Department of Chemistry, Hanyang University, Seoul 04763, Republic of Korea.
Nano Lett ; 22(24): 10080-10087, 2022 12 28.
Article em En | MEDLINE | ID: mdl-36475711
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Texto completo: 1 Base de dados: MEDLINE Assunto principal: Nanoestruturas Idioma: En Revista: Nano Lett Ano de publicação: 2022 Tipo de documento: Article
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Base de dados: MEDLINE Assunto principal: Nanoestruturas Idioma: En Revista: Nano Lett Ano de publicação: 2022 Tipo de documento: Article