Impact of synthesis temperature and precursor ratio on the crystal quality of MOCVD WSe<sub>2</sub>monolayers.

Grundmann, Annika; Beckmann, Yannick; Ghiami, Amir; Bui, Minh; Kardynal, Beata; Patterer, Lena; Schneider, Jochen; Kümmell, Tilmar; Bacher, Gerd; Heuken, Michael; Kalisch, Holger; Vescan, Andrei

Impact of synthesis temperature and precursor ratio on the crystal quality of MOCVD WSe₂monolayers.

Grundmann, Annika; Beckmann, Yannick; Ghiami, Amir; Bui, Minh; Kardynal, Beata; Patterer, Lena; Schneider, Jochen; Kümmell, Tilmar; Bacher, Gerd; Heuken, Michael; Kalisch, Holger; Vescan, Andrei.

Afiliação

Grundmann A; Compound Semiconductor Technology, RWTH Aachen University, D-52074 Aachen, Germany.
Beckmann Y; Werkstoffe der Elektrotechnik and CENIDE, University of Duisburg-Essen, D-47057 Duisburg, Germany.
Ghiami A; Compound Semiconductor Technology, RWTH Aachen University, D-52074 Aachen, Germany.
Bui M; Peter Grünberg Institute (PGI-9), Forschungszentrum Jülich, D-52425 Jülich, Germany.
Kardynal B; Department of Physics, RWTH Aachen University, D-52074 Aachen, Germany.
Patterer L; Peter Grünberg Institute (PGI-9), Forschungszentrum Jülich, D-52425 Jülich, Germany.
Schneider J; Department of Physics, RWTH Aachen University, D-52074 Aachen, Germany.
Kümmell T; Materials Chemistry, RWTH Aachen University, D-52074 Aachen, Germany.
Bacher G; Materials Chemistry, RWTH Aachen University, D-52074 Aachen, Germany.
Heuken M; Werkstoffe der Elektrotechnik and CENIDE, University of Duisburg-Essen, D-47057 Duisburg, Germany.
Kalisch H; Werkstoffe der Elektrotechnik and CENIDE, University of Duisburg-Essen, D-47057 Duisburg, Germany.
Vescan A; Compound Semiconductor Technology, RWTH Aachen University, D-52074 Aachen, Germany.

Nanotechnology ; 34(20)2023 Mar 01.

Article em En | MEDLINE | ID: mdl-36745916

Palavras-chave

2D materials; MOCVD; WSe2; defects; growth parameters; metal-organic chemical vapor deposition; transition metal dichalcogenides

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Texto completo: 1 Base de dados: MEDLINE Idioma: En Revista: Nanotechnology Ano de publicação: 2023 Tipo de documento: Article País de afiliação: Alemanha

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Texto completo: 1 Base de dados: MEDLINE Idioma: En Revista: Nanotechnology Ano de publicação: 2023 Tipo de documento: Article País de afiliação: Alemanha