Dual-wavelength spiral interferometry.

ABSTRACT

Spiral interferometry acquires the topography of the sample and determines the elevation or depression of the sample structure by a single measurement. The method has advantages in simple measurements and stable optical setup due to the coaxial interferometer. However, the measurable axial range was limited by the wavelength of the light. Here, we demonstrate dual-wavelength spiral interferometry without a significant modification to the original setup of the spiral interferometry. The retrieved phase profile using a synthesized wavelength of 3.33 µm enlarges the measurable axial range with a magnification factor of 6.2 compared with that measured by the light at 532 nm.