Resonant cavity-enhanced photodiode array for miniaturised spectroscopic sensing.

Optical spectroscopic sensing is a technique that is commonly employed for the identification and compositional analysis of a wide variety of substances, from biological samples to greenhouse gases. High-resolution spectrometers are well established, however, attempts to miniaturise the designs can suffer from adverse effects due to the miniaturisation, for both Fourier transform based interferometric designs, as well as dispersive designs. In this work, a linear array of resonant cavity-enhanced photodiodes is realised with spatially chirped resonance wavelength, offering chip-scale free-space hyperspectral sensing. Resonant cavity-enhanced photodiodes sense over a narrow spectral band, which can be tuned by the thicknesses of the heterostructure. Through this work, multiple narrow spectral bands can be sensed by resonant cavity-enhanced photodiodes on a single chip by grading the thicknesses across the wafer. Photocurrent measurements from a fabricated array determine the wavelength of incident light with an accuracy of ± 2 nm.

Resonant cavity-enhanced photodetector incorporating a type-II superlattice to extend MWIR sensitivity.

Mid-infrared resonant cavity-enhanced photodetectors (RCE PD) present a promising technology for targeted gas detection. We demonstrate an RCE PD incorporating an InAs/InAsSb superlattice as the detecting element, extending the resonant wavelength beyond 4 µm. AlAsSb/GaSb mirrors and a unipolar barrier active region paralleling an nBn structure are also used, and performance is compared to a conventional broadband nBn detector incorporating the same superlattice. The RCE PD exhibited a Q-factor of ∼90 and an extremely stable resonance wavelength. Peak responsivity was 3.0 A W-1 at 240 K, equalling 84% quantum efficiency, a 5.5 times increase over the reference nBn at the same wavelength. Dark current density was 3.3×10-2 A cm-2 at 240 K, falling to 2.7×10-4 A cm-2 at 180 K. The broadband BLIP limit is approached at 180 K with specific detectivity of 2.1×1011 cm Hz1/2 W-1, which presents the potential of achieving BLIP-limited operation in the thermoelectric cooling regime.