A piezoelectric motor using two orthogonal bending modes of a hollow cylinder.

This paper proposes a compact ultrasonic motor with low manufacturing costs, a simpler driving circuit, and scalability. The stator of the motor presented in this paper consists of a hollow metal cylinder, whose outside surface was flattened on two sides at 90 degrees to each other, on which two rectangular piezoelectric plates were bonded. Because the cylinder has a partially square/partially circular outside surface, the stator has two degenerated bending modes that are orthogonal to each other. A wobbling motion is generated on the cylinder when only one piezoelectric plate is excited at a frequency between the two orthogonal bending modes. A rod through a pair of ferrules was used as the rotor of this motor. The prototype motor, whose stator was 2.4 mm in diameter and 10 mm in length, operated at 69.5 kHz, was experimentally characterized, and a maximum torque of 1.8 mNm was obtained.

A 1.6-mm, metal tube ultrasonic motor.

A miniaturized metal tube ultrasonic motor, the dimensions of which are 1.6 mm in diameter and 6 mm in length, was developed. Two flattened surfaces with 90-degrees were ground on the outer surface of the stator. Two PZT-based piezoelectric ceramics were bonded onto these flat surfaces. The asymmetrical surface of the stator developed the split of the two degenerated orthogonal bending modes, resulting in a wobble motion. The working frequency of the 1.6-mm motor with 6 mm in length was 130 kHz. A torque of 0.5 mNm was reached at a maximum power of 45 mW with a speed of 45 rad/sec. The maximum efficiency was 16%.