Three-dimensional laser micromachining system with integrated sub-100â
nm resolution in-situ measurement.
Opt Express
; 32(6): 9958-9966, 2024 Mar 11.
Article
em En
| MEDLINE
| ID: mdl-38571219
ABSTRACT
In this study, a three-dimensional (3D) laser micromachining system with an integrated sub-100â
nm resolution in-situ measurement system was proposed. The system used the same femtosecond laser source for in-situ measurement and machining, avoiding errors between the measurement and the machining positions. It could measure the profile of surfaces with an inclination angle of less than 10°, and the measurement resolution was greater than 100â
nm. Consequently, the precise and stable movement of the laser focus could be controlled, enabling highly stable 3D micromachining. The results showed that needed patterns could be machined on continuous surfaces using the proposed system. The proposed machining system is of great significance for broadening the application scenarios of laser machining.
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Base de dados:
MEDLINE
Idioma:
En
Revista:
Opt Express
Assunto da revista:
OFTALMOLOGIA
Ano de publicação:
2024
Tipo de documento:
Article