Microconical silicon mid-IR concentrators: spectral, angular and polarization response.

It is widely discussed in the literature that a problem of reduction of thermal noise of mid-wave and long-wave infrared (MWIR and LWIR) cameras and focal plane arrays (FPAs) can be solved by using light-concentrating structures. The idea is to reduce the area and, consequently, the thermal noise of photodetectors, while still providing a good collection of photons on photodetector mesas that can help to increase the operating temperature of FPAs. It is shown that this approach can be realized using microconical Si light concentrators with (111) oriented sidewalls, which can be mass-produced by anisotropic wet etching of Si (100) wafers. The design is performed by numerical modeling in a mesoscale regime when the microcones are sufficiently large (several MWIR wavelengths) to resonantly trap photons, but still too small to apply geometrical optics or other simplified approaches. Three methods of integration Si microcone arrays with the focal plane arrays are proposed and studied: (i) inverted microcones fabricated in a Si slab, which can be heterogeneously integrated with the front illuminated FPA photodetectors made from high quantum efficiency materials to provide resonant power enhancement factors (PEF) up to 10 with angle-of-view (AOV) up to 10°; (ii) inverted microcones, which can be monolithically integrated with metal-Si Schottky barrier photodetectors to provide resonant PEFs up to 25 and AOVs up to 30° for both polarizations of incident plane waves; and iii) regular microcones, which can be monolithically integrated with near-surface photodetectors to provide a non-resonant power concentration on compact photodetectors with large AOVs. It is demonstrated that inverted microcones allow the realization of multispectral imaging with ∼100 nm bands and large AOVs for both polarizations. In contrast, the regular microcones operate similar to single-pass optical components (such as dielectric microspheres), producing sharply focused photonic nanojets.

Photonic jets for highly efficient mid-IR focal plane arrays with large angle-of-view.

One of the trends in design of mid-wave infrared (MWIR) focal plane arrays (FPAs) consists in reduction of the pixel sizes which allows increasing the resolution and decreasing the dark currents of FPAs. To keep high light collection efficiency and to combine it with large angle-of-view (AOV) of FPAs, in this work we propose to use photonic jets produced by the dielectric microspheres for focusing and highly efficient coupling light into individual photodetector mesas. In this approach, each pixel of FPA is integrated with the appropriately designed, fixed and properly aligned microsphere. The tasks consist in developing technology of integration of microspheres with pixels on a massive scale and in developing designs of corresponding structures. We propose to use air suction through a microhole array for assembling ordered arrays of microspheres. We demonstrate that this technology allows obtaining large-scale arrays containing thousands of microspheres with ~1% defect rate which represents a clear advantage over the best results obtained by the techniques of directed self-assembly. We optimized the designs of such FPAs integrated with microspheres for achieving maximal angle of view (AOV) as a function of the index of refraction and diameter of the microspheres. Using simplified two-dimensional finite difference time domain (FDTD) modeling we designed structures where the microspheres are partly-immersed in a layer of photoresist or slightly truncated by using controllable temperature melting effects. Compared to the standard microlens arrays, our designs provide up to an order of magnitude higher AOVs reaching ~8° for back-illuminated and ~20° for front-illuminated structures.