Local pressure calibration method of inductively coupled plasma generator based on laser Thomson scattering measurement.

Based on laser Thomson scattering (TS) measurements and finite element method (FEM) simulations of electron density in inductively coupled plasma (ICP), the simulated local pressure calibration curves of ICP generator are obtained by comparing the experimental and simulated electron density distributions and maxima. The equation coefficients of theoretical model associated with the ICP generator experimental system can be obtained by fitting the simulation curve with the least square method, and the theoretical pressure calibration curves under different absorbed powers can be further obtained. Combined with the vacuum gauge measurements, both the simulated and theoretical pressure calibration curves can give the true local pressure in the plasma. The results of the local pressure calibration at the different absorbed powers show that the density gradient from the vacuum gauge sensor to the center of the coil in ICP generator cavity becomes larger with the increase of electron density, resulting in a larger gap between the measured value and the pressure calibration value. This calibration method helps to grasp the local pressure of ICP as an external control factor and helps to study the physicochemical mechanism of ICP in order to achieve higher performance in ICP etching, material modification, etc.

Propagation characteristics of terahertz wave in inductively coupled plasma.

Firstly, the electron density distribution of inductively coupled plasma (ICP) is measured by laser Thomson scattering (TS) method and the features of the ICP under the same experimental conditions are simulated by finite element method (FEM). The simulated results are in good agreement with the experimental results, which verifies the accuracy of the ICP generation simulation model. Secondly, the propagation characteristics of terahertz wave in ICP are measured by terahertz time domain spectroscopy (THz-TDS) and calculated by FEM according to the electron density distribution of ICP simulated in the first step above. The high consistency between the experimental and simulation results of terahertz wave propagation characteristics in ICP further proves the accuracy of terahertz wave transmission model in plasma and the feasibility of joint simulation with ICP generation simulation model.