Highly linear lithium niobate Michelson interferometer modulators assisted by spiral Bragg grating reflectors.

Highly linear electro-optic modulators are key components in analog microwave photonic links, offering on-chip direct mixing of optical and RF fields. In this work, we demonstrate a monolithic integrated Michelson interferometer modulator on thin-film lithium niobate (LN), that achieves linearized performance by modulating Bragg grating reflectors placed at the end of Michelson arms. The modulator utilizes spiral-shaped waveguide Bragg gratings on Z-cut LN with top and bottom electrodes to realize extensive reflectors, essential for linearized performance, in a highly integrated form. Optical waveguides are realized using rib etching of LN with precisely engineered bottom and top cladding layers made of silicon dioxide and SU-8 polymer, respectively. The compact design fits a 3 mm long grating in an 80 µm × 80 µm area, achieving a broad operating bandwidth up to 18 GHz. A spurious free dynamic range (SFDR) of 101.2 dB·Hz2/3 is demonstrated at 1 GHz, compared to 91.5 dB·Hz2/3 for a reference Mach-Zehnder modulator fabricated on the same chip. Further enhancement in SFDR could be achieved by reducing fiber-to-chip coupling loss. The proposed demonstration could significantly improve the linearity of analog modulator-based integrated optical links.

Investigating Substrate Loss in MEMS Acoustic Resonators and On-Chip Inductors.

This work studies the influence of substrate loss on the performance of acoustic resonators and on-chip inductors and investigates the effective substrate resistivity of seven commonly used substrates in silicon-based devices. The substrates include X-cut lithium niobate (LiNbO3) film with two different thicknesses (400 nm and 1.6 [Formula: see text]) on high-resistivity Si (HR-Si) and amorphous Si wafers, SiO2 film with two different thicknesses on HR-Si, and bare HR-Si. The effective resistivities of these substrates are extracted using coplanar waveguides (CPWs) over a frequency range from 1 to 40 GHz. Using the effective resistivity approach, the efficiency of two substrate loss reduction techniques-Si wafer removal and amorphous Si-in reducing substrate loss is quantified. Comparison of the extracted substrate resistivities of the suspended and un-suspended dielectric-on-Si structures and comparison of LiNbO3 on HR-Si and amorphous Si are carried out. Substrate loss reduction techniques are more advantageous for a thinner dielectric film and at a lower frequency range due to the higher filling factor of the electric field in the Si wafer. Finally, by comparison of the effective substrate resistivity of SiO2 film on an HR-Si with bare HR-Si, thick plasma-enhanced chemical vapor deposition (PECVD) SiO2 film is found to be a good insulation layer to reduce substrate loss.

Compact MZI modulators on thin film Z-cut lithium niobate.

In this paper, we designed, implemented, and characterized compact Mach-Zehnder interferometer-based electro-optic modulators. The modulator utilizes spiral-shaped optical waveguides on Z-cut lithium niobate and the preeminent electro-optic effect which is applied using top and bottom electrodes. Optical waveguides are made of rib etched lithium niobate waveguides with bottom silicon oxide cladding, while SU8 polymer covers the top and sides of the rib waveguides. The proposed implementation resulted in low optical losses < 1.3 dB/cm. Moreover, we achieved compact modulators that fit 0.286 cm and 2 cm long optical waveguides in 110 µm × 110 µm and 300 µm × 300 µm areas, respectively. For single arm modulation, the modulators achieved a VπL of 7.4 V.cm and 6.4 V.cm and 3-dB bandwidths of 9.3 GHz and 2.05 GHz, respectively. Push-pull modulation is expected to cut these VπL in half. The proposed configuration avoids traveling wave modulation complexities and represents a key development towards miniature and highly integrated photonic circuits.

L- and X-Band Dual-Frequency Synthesizer Utilizing Lithium Niobate RF-MEMS and Open-Loop Frequency Dividers.

This article presents an 8.6-GHz oscillator utilizing the third-order antisymmetric overtone ( A3 ) in a lithium niobate (LiNbO3) radio frequency microelectromechanical systems (RF-MEMS) resonator. The oscillator consists of an acoustic resonator in a closed loop with cascaded RF tuned amplifiers (TAs) built on Taiwan Semiconductor Manufacturing Company (TSMC) RF general purpose (GP) 65-nm complementary metal-oxide semiconductor (CMOS). The TAs bandpass response, set by on-chip inductors, satisfies Barkhausen's oscillation conditions for A3 while suppressing the fundamental and higher order resonances. Two circuit variations are implemented. The first is an 8.6-GHz standalone oscillator with a source-follower buffer for direct 50- Ω -based measurements. The second is an oscillator-divider chain using an on-chip three-stage divide-by-two frequency divider for a ~1.1-GHz output. The standalone oscillator achieves a measured phase noise of -56, -113, and -135 dBc/Hz at 1 kHz, 100 kHz, and 1 MHz offsets from an 8.6-GHz output while consuming 10.2 mW of dc power. The oscillator also attains a figure-of-merit of 201.6 dB at 100-kHz offset, surpassing the state-of-the-art (SoA) oscillators-based electromagnetic (EM) and RF-MEMS. The oscillator-divider chain produces a phase noise of -69.4 and -147 dBc/Hz at 1 kHz and 1 MHz offsets from a 1075-MHz output while consuming 12 mW of dc power. Its phase noise performance also surpasses the SoA L -band phase-locked loops (PLLs). With further optimization, this work can enable low-power multistandard wireless transceivers featuring high speed, high sensitivity, and high selectivity in small-form factors.

Lateral Spurious Mode Suppression in Lithium Niobate A1 Resonators.

This work presents an improved design that exploits dispersion matching to suppress the spurious modes in the lithium niobate first-order antisymmetric (A1) Lamb wave mode resonators. The dispersion matching in this work is achieved by micro-machining the lithium niobate thin film to balance the electrical and mechanical loadings of electrodes. In this article, the dispersion matchings of the A1 mode in lithium niobate based on different metals are analytically modeled and validated with finite-element analysis. The fabricated devices exhibit spurious-free responses with a quality factor of 692 and an electromechanical coupling coefficient of 28%. The demonstrated method herein could overcome a significant hurdle that is currently impeding the commercialization of A1 devices.

Wideband Hybrid Monolithic Lithium Niobate Acoustic Filter in the K-Band.

This article presents the design approach and the first demonstration of a wideband hybrid monolithic acoustic filter in the K -band, which exceeds the limitation of electromechanical coupling on the fractional bandwidth (FBW) of acoustic filters. The hybrid filter utilizes the codesign of electromagnetic (EM) and acoustic to attain wide bandwidth while keeping the advantages of small sizes and high Q in the acoustic domain. The performance trade space and design flow of the hybrid filter are also presented in this article, which allows this technology to be applied for filters with different center frequencies and FBWs. The hybrid filter is simulated by hybridizing the EM and acoustic finite element analysis, which are carried out separately and combined at a system level. The fabricated filter built with resonators having an electromechanical coupling of 0.7% based on the seventh-order antisymmetric Lamb wave mode (A7) has a 3-dB FBW of 2.4% at 19 GHz and a compact footprint of 1.4 mm2.

Acoustically driven electromagnetic radiating elements.

The low propagation loss of electromagnetic radiation below 1 MHz offers significant opportunities for low power, long range communication systems to meet growing demand for Internet of Things applications. However, the fundamental reduction in efficiency as antenna size decreases below a wavelength (30 m at 1 MHz) has made portable communication systems in the very low frequency (VLF: 3-30 kHz) and low frequency (30-300 kHz) ranges impractical for decades. A paradigm shift to piezoelectric antennas utilizing strain-driven currents at resonant wavelengths up to five orders of magnitude smaller than electrical antennas offers the promise for orders of magnitude efficiency improvement over the electrical state-of-the-art. This work demonstrates a lead zirconate titanate transmitter > 6000 times more efficient than a comparably sized electrical antenna and capable of bit rates up to 60 bit/s. Detailed analysis of design parameters offers a roadmap for significant future improvement in both radiation efficiency and data rate.

Ultra-efficient and fully isotropic monolithic microring modulators in a thin-film lithium niobate photonics platform.

The large electro-optic coefficient, r33, of thin-film lithium niobate (LN) on insulator makes it an excellent material platform for high-efficiency optical modulators. Using the fundamental transverse magnetic optical mode in Z-cut LN enables isotropic in-plane devices; however, realizing a strong vertical electric field to capitalize on r33 has been challenging. Here we present a symmetric electrode configuration to boost the vertical field strength inside a fully-etched single-mode LN waveguide. We use this design paradigm to demonstrate an ultra-compact fully isotropic microring modulator with a high electro-optic tuning efficiency of 9 pm/V, extinction ratio of 20 dB, and modulation bandwidth beyond 28 GHz. Under quasi-static operation, the tuning efficiency of the modulator reaches 20 pm/V. Fast, efficient, high-contrast modulation will be critical in future optical communication systems while large quasi-static efficiency will enable post-fabrication trimming, thermal compensation, and even complete reconfiguration of microring-based sensor arrays and photonic integrated circuits.

Low-Loss Unidirectional Acoustic Focusing Transducer in Thin-Film Lithium Niobate.

In this work, we present gigahertz low-loss unidirectional acoustic focusing transducers in thin-film lithium niobate. The design follows the anisotropy of fundamental symmetric (S0) waves in X-cut lithium niobate. The implemented acoustic delay line testbed consisting of a pair of the proposed transducers shows a low insertion loss of 4.2 dB and a wide fractional bandwidth of 7.5% at 1 GHz. The extracted transducer loss is 1.46 dB, and the propagation loss of the S0 waves is 0.0126 dB/ [Formula: see text]. The design framework is readily extendable to other acoustic modes, given consideration on the optimal orientation for power flow and electromechanical transduction.

Fundamental electro-optic limitations of thin-film lithium niobate microring modulators.

We investigate the impact of waveguide curvature on the electro-optic efficiency of microring resonators in thin-film X-cut or Y-cut lithium niobate (in-plane extraordinary axis) and derive explicit relations on the response. It is shown that such microring modulators have a fundamental upper bound on their electro-optic performance (∼50% filling factor) which corresponds to a specific arrangement of metal electrodes surrounding the microring and yields nearly identical results for X-cut and Y-cut designs. We further show that this limitation does not exist (i.e., 100% filling factor is possible) with Z-cut microring modulators or can be circumvented (i.e., ∼100% filling factor is possible) in X-cut and Y-cut modulators that use a race-track configuration with segmented electrodes. Comparison of our analytical results with multiphysics simulations and measured electro-optic efficiencies of microring resonators in the literature demonstrates the validity and accuracy of our approach.

A Wideband Oscillator Exploiting Multiple Resonances in Lithium Niobate MEMS Resonator.

This article presents a comprehensive guide to codesign lithium niobate (LiNbO3) lateral overtone bulk acoustic resonators (LOBARs) and voltage-controlled oscillators (VCOs) using discrete components on a printed circuit board (PCB). The analysis focuses on understanding the oscillator-level tradeoffs between the number of locked tones, frequency stability, tuning range, power consumption, and phase noise. Moreover, this article focuses on understanding the relationship between the abovementioned specifications and the different LOBAR parameters, such as electromechanical coupling ( kt2 ), quality factor ( Q ), transducer design, and the resonator size. As a result of this study, the first voltage-controlled MEMS oscillator (VCMO) based on LiNbO3 LOBAR is demonstrated. Our LOBAR excites over 30 resonant modes in the range of 100-800 MHz with a frequency spacing of 20 MHz. The VCMO consists of an LOBAR in a closed loop with two amplification stages and a varactor-embedded tunable LC tank. By adjusting the bias voltage applied to the varactor, the tank can be tuned to change the closed-loop gain and phase responses of the oscillator so that the Barkhausen conditions are satisfied for a particular resonant mode. The tank is designed to allow the proposed VCMO to lock to any of the ten overtones ranging from 300 to 500 MHz. These ten tones are characterized by average [Formula: see text] of 2100, kt2 of 1.5%, figure of merit ( [Formula: see text]) of 31.5 enabling low phase noise, and low-power oscillators crucial for Internet of Things (IoT). Due to the high [Formula: see text] of the LiNbO3 LOBAR, the measured VCMO shows a close-in phase noise of -100 dBc/Hz at 1-kHz offset from a 300-MHz carrier and a noise floor of -153 dBc/Hz while consuming 9 mW. With further optimization, this VCMO can lead to direct radio frequency (RF) synthesis for ultralow-power transceivers in multimode IoT nodes.

GHz Low-Loss Acoustic RF Couplers in Lithium Niobate Thin Film.

We present the first group of GHz low-loss acoustic radio frequency (RF) couplers using the fundamental symmetric (S0) mode in X-cut lithium niobate thin films. The demonstrated multistrip couplers (MSCs) significantly surpass the insertion loss (IL) and the operating frequency of the previous works in more compact structures, thanks to the large electromechanical coupling and low loss of S0 in lithium niobate. The design space of S0 MSCs is first explored. Devices with different coupling factors are fabricated using different numbers of strips. Based on the S0 testbed with an IL of 4.5 dB at 1 GHz, the hybrid coupler shows an IL of 7.5 dB, while the track changer shows an IL of 5.1 dB, over a 3-dB fractional bandwidth of 8%. Couplers at different frequencies (between 0.75 and 1.55 GHz) are also investigated. Upon further optimizations, the S0 MSC platform can potentially enable low-loss wideband signal processing functions toward an RF acoustic component kit.

Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology.

Monolithic strong magnetic induction at the mtesla to tesla level provides essential functionalities to physical, chemical, and medical systems. Current design options are constrained by existing capabilities in three-dimensional (3D) structure construction, current handling, and magnetic material integration. We report here geometric transformation of large-area and relatively thick (~100 to 250 nm) 2D nanomembranes into multiturn 3D air-core microtubes by a vapor-phase self-rolled-up membrane (S-RuM) nanotechnology, combined with postrolling integration of ferrofluid magnetic materials by capillary force. Hundreds of S-RuM power inductors on sapphire are designed and tested, with maximum operating frequency exceeding 500 MHz. An inductance of 1.24 µH at 10 kHz has been achieved for a single microtube inductor, with corresponding areal and volumetric inductance densities of 3 µH/mm2 and 23 µH/mm3, respectively. The simulated intensity of the magnetic induction reaches tens of mtesla in fabricated devices at 10 MHz.

A Unidirectional Transducer Design for Scaling GHz AlN-Based RF Microsystems.

In this work, we present a novel unidirectional transducer design for frequency scaling aluminum nitride (AlN)-based radio frequency (RF) microsystems. The proposed thickness-field-excited single-phase unidirectional transducers (TFE-SPUDT) adopt 5/16 wavelength electrodes and, thus, enable efficient piezoelectric transduction with better frequency scalability. The design space of the TFE-SPUDT is theoretically explored and validated using the acoustic delay line (ADL) testbeds. The ADL testbeds with a large feature size of [Formula: see text] show a center frequency of 1 GHz, a minimum insertion loss (IL) of 4.9 dB, and a fractional bandwidth (FBW) of 5.3%, significantly surpassing the IL and frequency scalability of the previously reported AlN transducers. The design approach can potentially contribute to various AlN-based RF microsystems for signal processing, physical sensing, optomechanical interaction, and quantum acoustic applications, and are readily extendable to other piezoelectric platforms.

A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500 °C in Air.

This paper reports the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO3; LN) MEMS resonator array up to 500 °C in air. After a high-temperature burn-in treatment, device quality factor (Q) was enhanced to 508 and the resonance shifted to a lower frequency and remained stable up to 500 °C. During subsequent in situ high-temperature testing, the resonant frequencies of two coupled shear horizontal (SH0) modes in the array were 87.36 MHz and 87.21 MHz at 25 °C and 84.56 MHz and 84.39 MHz at 500 °C, correspondingly, representing a -3% shift in frequency over the temperature range. Upon cooling to room temperature, the resonant frequency returned to 87.36 MHz, demonstrating the recoverability of device performance. The first- and second-order temperature coefficient of frequency (TCF) were found to be -95.27 ppm/°C and 57.5 ppb/°C2 for resonant mode A, and -95.43 ppm/°C and 55.8 ppb/°C2 for resonant mode B, respectively. The temperature-dependent quality factor and electromechanical coupling coefficient (kt2) were extracted and are reported. Device Q decreased to 334 and total kt2 increased to 12.40% after high-temperature exposure. This work supports the use of piezoelectric LN as a material platform for harsh environment radio-frequency (RF) resonant sensors (e.g., temperature and infrared) incorporated with high coupling acoustic readout.

Characterization of an Electronic Corneal Prosthesis System.

PURPOSE: Corneal opacity is a leading cause of reversible blindness worldwide. An electronic corneal prosthesis, or intraocular projector, could potentially restore high-quality vision without need for corneal clarity. MATERIALS AND METHODS: Four intraocular projection systems were constructed from commercially available electronic components and encased in biocompatible plastic housing. They were tested for optical properties, biocompatibility, heat dissipation, waterproofing, and accelerated wear. A surgical implantation technique was developed. RESULTS: Intraocular projectors were produced of a size that can fit within the eye. Their optics produce better than 20/200 equivalent visual acuity. MTT assay demonstrated no cytotoxicity of devices in vitro. Temperature testing demonstrated less than 2°C increase in temperature after 1 h. Three devices lasted over 12 weeks under accelerated wear conditions. Implantation surgery was demonstrated via corneal trephination insertion in a cadaver eye. CONCLUSION: This is the first study to demonstrate and characterize fully functional intraocular projection systems. This technology has the potential to be an important new tool in the treatment of intractable corneal blindness.

GHz Broadband SH0 Mode Lithium Niobate Acoustic Delay Lines.

We present the first group of GHz broadband SH0 mode acoustic delay lines (ADLs). The implemented ADLs adopt unidirectional transducer designs in a suspended X-cut lithium niobate thin film. The design space of the SH0 mode ADLs at GHz is first theoretically investigated, showing that the large coupling and sufficient spectral clearance to adjacent modes collectively enable the broadband performance of SH0 delay lines. The fabricated devices show 3-dB fractional bandwidth ranging from 4% to 34.3% insertion loss between 3.4 and 11.3 dB. Multiple delay lines have been demonstrated with center frequencies from 0.7 to 1.2 GHz, showing great frequency scalability. The propagation characteristics of SH0 in lithium niobate thin film are experimentally extracted. The demonstrated ADLs can potentially facilitate broadband signal processing applications.

High performance fully etched isotropic microring resonators in thin-film lithium niobate on insulator platform.

We present our design, fabrication, and experimental results for very high-performance isotropic microring resonators with small radii (∼ 30 µm) based on single-mode strip waveguides and transverse magnetic (TM) polarization in a fully etched lithium niobate (Z-cut) thin-film on insulator. The loss of the devices is predicted to be < 10 dB/cm, and is measured to be ∼ 7 dB/cm. The measured optical responses of microring resonators exhibit an extinction of ∼ 25 dB (close to critical coupling), a 3 dB optical bandwidth of 49 pm (∼ 6 GHz) for all-pass structures, an extinction of ∼ 10 dB for add-drop structures, and a free spectral range of ∼ 5.26 nm, all of which are in excellent agreement with the design. This work is the first step towards ultra-compact and fully isotropic optical modulators in thin-film lithium niobate on insulator.

Realization of alignment-tolerant grating couplers for z-cut thin-film lithium niobate.

We present the design, modeling, fabrication, and characterization of grating coupler devices for z-cut lithium niobate near 1550 nm. We first experimentally measure the sensitivity of the insertion loss of a conventional grating coupler to translational misalignment through a three-factor full factorial design of experiment. Next, we design grating couplers that are significantly less sensitive to misalignment. The fabricated devices experienced less than 7 dB of excess insertion loss for combined misalignments of up to ± 5 µm in plane and up to -2 µm or + 10 µm out of plane.

Gigahertz Low-Loss and Wideband S0 Mode Lithium Niobate Acoustic Delay Lines.

We present the first group of gigahertz S0 mode low loss and wideband acoustic delay lines (ADLs). The ADLs use a single-phase unidirectional transducers (SPUDT) design to launch and propagate the S0 mode in an X-cut lithium niobate thin film with large electromechanical coupling and low damping. In this work, the theoretical performance bounds of S0 mode ADLs are first investigated, significantly surpassing those in state-of-the-art. The design tradeoffs of S0 mode ADLs, when scaled to the gigahertz frequency range, are also discussed. The fabricated miniature ADLs show a fractional bandwidth (FBW) of 4% and a minimum insertion loss (IL) of 3.2 dB, outperforming the incumbent surface acoustic wave (SAW) counterparts, and covering a wide range of delays from 20 to 900 ns for digitally addressable delay synthesis. Multiple ADLs with center frequencies from 0.9 to 2 GHz have been demonstrated, underscoring their great frequency scalability. The propagation properties of S0 waves in lithium niobate at the gigahertz range are experimentally extracted. The demonstrated ADLs can potentially enable wide-range and high-resolution delay synthesis that is highly sought after for the self-interference cancellation in full-duplex radios.