Development of a 3-DOF Angle Sensor Based on a Single Laser Interference Probe.

The development of high-precision satellites has increased the demand for ultraprecision three-degrees-of-freedom (3-DOF) angle measurements for detecting structural deformation. The required instrument should simultaneously measure pitch, yaw, and roll angles using a single reference point. This paper proposes a 3-DOF angle measurement method based on the wavefront interference principle, and a mathematical model and its decoupling algorithm were built. Then, an angle-sensing probe with an extremely simple structure was designed and constructed. Finally, a series of experiments were performed to verify the method's feasibility. The experiment results showed that the roll, pitch, and yaw measurement resolution of the probe was better than 10, 1, and 1 µrad, respectively, providing a high-performance 3-DOF angle measurement with a single probe. The short-term stabilities of roll, pitch, and yaw were better than 22, 1.7, and 2.0 µrad, respectively.

A Two-Dimensional Precision Level for Real-Time Measurement Based on Zoom Fast Fourier Transform.

This paper proposes a two-dimensional precision level for real-time measurement using a zoom fast Fourier transform (zoom FFT)-based decoupling algorithm that was developed and integrated in an FPGA. This algorithm solves the contradiction between obtaining high resolution and obtaining high measurement speed, and achieves both high angle-resolution measurement and real-time measurement. The proposed level adopts a silicone-oil surface as the angle-sensitive interface and combines the principle of homodyne interference. By analyzing the frequency of the interference fringes, the angle variation can be determined. The zoom-FFT-based decoupling algorithm improves the system's frequency resolution of the interference fringes, thereby significantly enhancing the angle resolution. Furthermore, this algorithm improves the efficiency of angle decoupling, while the angle decoupling process can also be transplanted to the board to realize real-time measurement of the level. Finally, a prototype based on the level principle was tested to validate the effectiveness of the proposed method. The principle analysis and test results showed that the angle resolution of the prototype improved from 9 arcsec to about 0.1 arcsec using this angle-solution method. At the same time, the measurement repeatability of the prototype was approximately ±0.2 arcsec. In comparison with a commercial autocollimator, the angle measurement accuracy reached ±0.6 arcsec.