Centimeter-scale nanomechanical resonators with low dissipation.

High-aspect-ratio mechanical resonators are pivotal in precision sensing, from macroscopic gravitational wave detectors to nanoscale acoustics. However, fabrication challenges and high computational costs have limited the length-to-thickness ratio of these devices, leaving a largely unexplored regime in nano-engineering. We present nanomechanical resonators that extend centimeters in length yet retain nanometer thickness. We explore this expanded design space using an optimization approach which judiciously employs fast millimeter-scale simulations to steer the more computationally intensive centimeter-scale design optimization. By employing delicate nanofabrication techniques, our approach ensures high-yield realization, experimentally confirming room-temperature quality factors close to theoretical predictions. The synergy between nanofabrication, design optimization guided by machine learning, and precision engineering opens a solid-state path to room-temperature quality factors approaching 10 billion at kilohertz mechanical frequencies - comparable to the performance of leading cryogenic resonators and levitated nanospheres, even under significantly less stringent temperature and vacuum conditions.

High-Strength Amorphous Silicon Carbide for Nanomechanics.

For decades, mechanical resonators with high sensitivity have been realized using thin-film materials under high tensile loads. Although there are remarkable strides in achieving low-dissipation mechanical sensors by utilizing high tensile stress, the performance of even the best strategy is limited by the tensile fracture strength of the resonator materials. In this study, a wafer-scale amorphous thin film is uncovered, which has the highest ultimate tensile strength ever measured for a nanostructured amorphous material. This silicon carbide (SiC) material exhibits an ultimate tensile strength of over 10 GPa, reaching the regime reserved for strong crystalline materials and approaching levels experimentally shown in graphene nanoribbons. Amorphous SiC strings with high aspect ratios are fabricated, with mechanical modes exceeding quality factors 108 at room temperature, the highest value achieves among SiC resonators. These performances are demonstrated faithfully after characterizing the mechanical properties of the thin film using the resonance behaviors of free-standing resonators. This robust thin-film material has significant potential for applications in nanomechanical sensors, solar cells, biological applications, space exploration, and other areas requiring strength and stability in dynamic environments. The findings of this study open up new possibilities for the use of amorphous thin-film materials in high-performance applications.

A Fiber-Coupled Scanning Magnetometer with Nitrogen-Vacancy Spins in a Diamond Nanobeam.

Magnetic imaging with nitrogen-vacancy (NV) spins in diamond is becoming an established tool for studying nanoscale physics in condensed matter systems. However, the optical access required for NV spin readout remains an important hurdle for operation in challenging environments such as millikelvin cryostats or biological systems. Here, we demonstrate a scanning-NV sensor consisting of a diamond nanobeam that is optically coupled to a tapered optical fiber. This nanobeam sensor combines a natural scanning-probe geometry with high-efficiency through-fiber optical excitation and readout of the NV spins. We demonstrate through-fiber optically interrogated electron spin resonance and proof-of-principle magnetometry operation by imaging spin waves in an yttrium-iron-garnet thin film. Our scanning-nanobeam sensor can be combined with nanophotonic structuring to control the light-matter interaction strength and has potential for applications that benefit from all-fiber sensor access, such as millikelvin systems.

Mechanical overtone frequency combs.

Mechanical frequency combs are poised to bring the applications and utility of optical frequency combs into the mechanical domain. So far, their main challenge has been strict requirements on drive frequencies and power, which complicate operation. We demonstrate a straightforward mechanism to create a frequency comb consisting of mechanical overtones (integer multiples) of a single eigenfrequency, by monolithically integrating a suspended dielectric membrane with a counter-propagating optical trap. The periodic optical field modulates the dielectrophoretic force on the membrane at the overtones of a membrane's motion. These overtones share a fixed frequency and phase relation, and constitute a mechanical frequency comb. The periodic optical field also creates an optothermal parametric drive that requires no additional power or external frequency reference. This combination of effects results in an easy-to-use mechanical frequency comb platform that requires no precise alignment, no additional feedback or control electronics, and only uses a single, mW continuous wave laser beam. This highlights the overtone frequency comb as the straightforward future for applications in sensing, metrology and quantum acoustics.

Spiderweb Nanomechanical Resonators via Bayesian Optimization: Inspired by Nature and Guided by Machine Learning.

From ultrasensitive detectors of fundamental forces to quantum networks and sensors, mechanical resonators are enabling next-generation technologies to operate in room-temperature environments. Currently, silicon nitride nanoresonators stand as a leading microchip platform in these advances by allowing for mechanical resonators whose motion is remarkably isolated from ambient thermal noise. However, to date, human intuition has remained the driving force behind design processes. Here, inspired by nature and guided by machine learning, a spiderweb nanomechanical resonator is developed that exhibits vibration modes, which are isolated from ambient thermal environments via a novel "torsional soft-clamping" mechanism discovered by the data-driven optimization algorithm. This bioinspired resonator is then fabricated, experimentally confirming a new paradigm in mechanics with quality factors above 1 billion in room-temperature environments. In contrast to other state-of-the-art resonators, this milestone is achieved with a compact design that does not require sub-micrometer lithographic features or complex phononic bandgaps, making it significantly easier and cheaper to manufacture at large scales. These results demonstrate the ability of machine learning to work in tandem with human intuition to augment creative possibilities and uncover new strategies in computing and nanotechnology.

Microwave-to-optics conversion using a mechanical oscillator in its quantum groundstate.

Conversion between signals in the microwave and optical domains is of great interest both for classical telecommunication, as well as for connecting future superconducting quantum computers into a global quantum network. For quantum applications, the conversion has to be both efficient, as well as operate in a regime of minimal added classical noise. While efficient conversion has been demonstrated using mechanical transducers, they have so far all operated with a substantial thermal noise background. Here, we overcome this limitation and demonstrate coherent conversion between GHz microwave signals and the optical telecom band with a thermal background of less than one phonon. We use an integrated, on-chip electro-opto-mechanical device that couples surface acoustic waves driven by a resonant microwave signal to an optomechanical crystal featuring a 2.7 GHz mechanical mode. We initialize the mechanical mode in its quantum groundstate, which allows us to perform the transduction process with minimal added thermal noise, while maintaining an optomechanical cooperativity >1, so that microwave photons mapped into the mechanical resonator are effectively upconverted to the optical domain. We further verify the preservation of the coherence of the microwave signal throughout the transduction process.

Feedback Cooling of a Room Temperature Mechanical Oscillator close to its Motional Ground State.

Preparing mechanical systems in their lowest possible entropy state, the quantum ground state, starting from a room temperature environment is a key challenge in quantum optomechanics. This would not only enable creating quantum states of truly macroscopic systems, but at the same time also lay the groundwork for a new generation of quantum-limited mechanical sensors in ambient environments. Laser cooling of optomechanical devices using the radiation pressure force combined with cryogenic precooling has been successful at demonstrating ground state preparation of various devices, while a similar demonstration starting from a room temperature environment remains an outstanding goal. Here, we combine integrated nanophotonics with phononic band gap engineering to simultaneously overcome prior limitations in the isolation from the surrounding environment and the achievable mechanical frequencies, as well as limited optomechanical coupling strength, demonstrating a single-photon cooperativity of 200. This new microchip technology allows us to feedback cool a mechanical resonator to around 1 mK, near its motional ground state, from room temperature. Our experiment marks a major step toward accessible, widespread quantum technologies with mechanical resonators.

Nanofabricated tips for device-based scanning tunneling microscopy.

We report on the fabrication and performance of a new kind of tip for scanning tunneling microscopy. By fully incorporating a metallic tip on a silicon chip using modern micromachining and nanofabrication techniques, we realize so-called smart tips and show the possibility of device-based STM tips. Contrary to conventional etched metal wire tips, these can be integrated into lithographically defined electrical circuits. We describe a new fabrication method to create a defined apex on a silicon chip and experimentally demonstrate the high performance of the smart tips, both in stability and resolution. In situ tip preparation methods are possible and we verify that they can resolve the herringbone reconstruction and Friedel oscillations on Au(111) surfaces. We further present an overview of possible applications.

Integrated Optomechanical Arrays of Two High Reflectivity SiN Membranes.

Multielement cavity optomechanics constitutes a direction to observe novel effects with mechanical resonators. Several exciting ideas include superradiance, increased optomechanical coupling, and quantum effects between distinct mechanical modes among others. Realizing these experiments has so far been difficult, because of the need for extremely precise positioning of the elements relative to one another due to the high-reflectivity required for each element. Here we overcome this challenge and present the fabrication of monolithic arrays of two highly reflective mechanical resonators in a single chip. We characterize the optical spectra and losses of these 200 µm long Fabry-Pérot interferometers, measuring finesse values of up to 220. In addition, we observe an enhancement of the coupling rate between the cavity field and the mechanical center-of-mass mode compared to the single membrane case. Further enhancements in coupling with these devices are predicted, potentially reaching the single-photon strong coupling regime, giving these integrated structures an exciting prospect for future multimode quantum experiments.

Centimeter-scale suspended photonic crystal mirrors.

Demand for lightweight, highly reflective and mechanically compliant mirrors for optics experiments has seen a significant surge. In this aspect, photonic crystal (PhC) membranes are ideal alternatives to conventional mirrors, as they provide high reflectivity with only a single suspended layer of patterned dielectric material. However, due to limitations in nanofabrication, these devices are usually not wider than 300 µm. Here we experimentally demonstrate suspended PhC mirrors spanning areas up to 10 × 10 mm2. We overcome limitations imposed by the size of the PhC and measure reflectivities greater than 90 % on 56 nm thick mirrors at a wavelength of 1550 nm-an unrivaled performance compared to PhC mirrors with micro scale diameters. These structures bridge the gap between nano scale technologies and macroscopic optical elements.

Hanbury Brown and Twiss interferometry of single phonons from an optomechanical resonator.

Nano- and micromechanical solid-state quantum devices have become a focus of attention. Reliably generating nonclassical states of their motion is of interest both for addressing fundamental questions about macroscopic quantum phenomena and for developing quantum technologies in the domains of sensing and transduction. We used quantum optical control techniques to conditionally generate single-phonon Fock states of a nanomechanical resonator. We performed a Hanbury Brown and Twiss-type experiment that verified the nonclassical nature of the phonon state without requiring full state reconstruction. Our result establishes purely optical quantum control of a mechanical oscillator at the single-phonon level.

Integrated optical force sensors using focusing photonic crystal arrays.

Mechanical oscillators are at the heart of many sensor applications. Recently several groups have developed oscillators that are probed optically, fabricated from high-stress silicon nitride films. They exhibit outstanding force sensitivities of a few aN/Hz1/2 and can also be made highly reflective, for efficient detection. The optical read-out usually requires complex experimental setups, including positioning stages and bulky cavities, making them impractical for real applications. In this paper we propose a novel way of building fully integrated all-optical force sensors based on low-loss silicon nitride mechanical resonators with a photonic crystal reflector. We can circumvent previous limitations in stability and complexity by simulating a suspended focusing photonic crystal, purely made of silicon nitride. Our design allows for an all integrated sensor, built out of a single block that integrates a full Fabry-Pérot cavity, without the need for assembly or alignment. The presented simulations will allow for a radical simplification of sensors based on high-Q silicon nitride membranes. Our results comprise, to the best of our knowledge, the first simulations of a focusing mirror made from a mechanically suspended flat membrane with subwavelength thickness. Cavity lengths between a few hundred µm and mm should be directly realizable.

Non-classical correlations between single photons and phonons from a mechanical oscillator.

Interfacing a single photon with another quantum system is a key capability in modern quantum information science. It allows quantum states of matter, such as spin states of atoms, atomic ensembles or solids, to be prepared and manipulated by photon counting and, in particular, to be distributed over long distances. Such light-matter interfaces have become crucial to fundamental tests of quantum physics and realizations of quantum networks. Here we report non-classical correlations between single photons and phonons--the quanta of mechanical motion--from a nanomechanical resonator. We implement a full quantum protocol involving initialization of the resonator in its quantum ground state of motion and subsequent generation and read-out of correlated photon-phonon pairs. The observed violation of a Cauchy-Schwarz inequality is clear evidence for the non-classical nature of the mechanical state generated. Our results demonstrate the availability of on-chip solid-state mechanical resonators as light-matter quantum interfaces. The performance we achieved will enable studies of macroscopic quantum phenomena as well as applications in quantum communication, as quantum memories and as quantum transducers.