Construction of Ag-TiO2 Hierarchical Micro-/Nanostructures on a Ti Plate for Photocatalysts via Femtosecond Laser Hybrid Technology.

Titanium dioxide photocatalysts can break down pollutants using natural light. They possess notable light stability, chemical stability, and catalytic effects, thus leading to extensive research worldwide. However, the limited light absorption range of titanium dioxide and their inefficiencies in generating and transporting photogenerated carriers hinder the enhancement of their photocatalytic performance. In this study, we employ a femtosecond laser composite processing method to create an Ag-TiO2 nanoplate composite catalyst. This method doubles the catalytic efficiency compared with the structure processed solely with the femtosecond laser. The resulting Ag-TiO2 nanoplate composite catalysts show significant promise for addressing environmental and energy challenges, including the photodegradation of organic pollutants.

Integration of cross-scale milli/microlenses by ion beam etching and femtosecond laser modification.

Integrated cross-scale milli/microlenses offer irreplaceable functions in modern integrated optics with the advantage of reducing the size of the optical system to millimeters or microns. However, the technologies for fabricating millimeter-scale lenses and microlenses are always incompatible, which makes the successful fabrication of cross-scale milli/microlenses with a controlled morphology challenging. Here, ion beam etching is proposed as a means to fabricate smooth millimeter-scale lenses on various hard materials. In addition, by combining femtosecond laser modification and ion beam etching, an integrated cross-scale concave milli/microlens (27,000 microlenses on a lens with a diameter of 2.5 mm) is demonstrated on fused silica, and can be used as the template for a compound eye. The results provide a new, to the best of our knowledge, route for the flexible fabrication of cross-scale optical components for modern integrated optical systems.

Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology.

Micro-opto-electromechanical systems (MOEMSs) are a new class of integrated and miniaturized optical systems that have significant applications in modern optics. However, the integration of micro-optical elements with complex morphologies on existing micro-electromechanical systems is difficult. Herein, we propose a femtosecond-laser-assisted dry etching technology to realize the fabrication of silicon microlenses. The size of the microlens can be controlled by the femtosecond laser pulse energy and the number of pulses. To verify the applicability of this method, multifocal microlens arrays (focal lengths of 7-9 µm) were integrated into a silicon microcantilever using this method. The proposed technology would broaden the application scope of MOEMSs in three-dimensional imaging systems.

Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification.

Femtosecond laser (fs-laser) is unfavorable in applications for the fabrication of micro-optical devices on hard materials owing to the problems of low fabrication efficiency and high surface roughness. Herein, a hybrid method combining fs-laser scanning, subsequent etching, and annealing was proposed to realize micro-optical devices with low roughness on glass. Compared to traditional laser ablation, the fabrication efficiency in this work was improved by one order of magnitude, and the surface roughness was decreased to 15 nm. Using this method, aspherical convex microlenses and spherical concave microlenses that possess excellent focusing and imaging properties are realized on photosensitive glass. The diameter and height of the microlenses were controlled by adjusting the fabrication parameters. These results indicate that the fs-laser-based hybrid method will open new opportunities for fabricating micro-optical components on hard materials.