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1.
Micromachines (Basel) ; 13(7)2022 Jun 26.
Artigo em Inglês | MEDLINE | ID: mdl-35888820

RESUMO

This paper presents the use of ferroelectric behavior in scandium-aluminum nitride (ScxAl1-xN) to create dual-mode Lamb-wave resonators for the realization of intrinsically configurable radio-frequency front-end systems. An integrated array of intrinsically switchable dual-mode Lamb-wave resonators with frequencies covering the 0.45-3 GHz spectrum. The resonators are created in ferroelectric scandium-aluminum nitride (Sc0.28Al0.72N) film and rely on period poling for intrinsic configuration between Lamb modes with highly different wavelengths and frequencies. A comprehensive analytical model is presented, formulating intrinsically switchable dual-mode operation and providing closed-form derivation of electromechanical coupling (kt2) in the two resonance modes as a function of electrode dimensions and scandium content. Fabricated resonator prototypes show kt2s as high as 4.95%, when operating in the first modes over 0.45-1.6 GHz, 2.23% when operating in the second mode of operation over 0.8-3 GHz, and series quality factors (Qs) over 300-800. Benefiting from lithographical frequency tailorability and intrinsic switchability that alleviate the need for external multiplexers, and large kt2 and Q, dual-mode Sc0.28Al0.72N Lamb-wave resonators are promising candidates to realize single-chip multi-band reconfigurable spectral processors for radio-frequency front-ends of modern wireless systems.

2.
ACS Appl Mater Interfaces ; 12(22): 25200-25210, 2020 Jun 03.
Artigo em Inglês | MEDLINE | ID: mdl-32400153

RESUMO

We explored the feasibility of wafer-scale two-dimensional (2D) molybdenum disulfide (MoS2) layers toward futuristic environmentally friendly electronics that adopt biodegradable substrates. Large-area (> a few cm2) 2D MoS2 layers grown on silicon dioxide/silicon (SiO2/Si) wafers were delaminated and integrated onto a variety of cellulose-based substrates of various components and shapes in a controlled manner; examples of the substrates include planar papers, cylindrical natural rubbers, and 2,2,6,6-tetramethylpiperidine-1-oxyl-oxidized cellulose nanofibers. The integrated 2D layers were confirmed to well preserve their intrinsic structural and chemical integrity even on such exotic substrates. Proof-of-concept devices employing large-area 2D MoS2 layers/cellulose substrates were demonstrated for a variety of applications, including photodetectors, pressure sensors, and field-effect transistors. Furthermore, we demonstrated the complete "dissolution" of the integrated 2D MoS2 layers in a buffer solution composed of baking soda and deionized water, confirming their environmentally friendly transient characteristics. Moreover, the approaches to delaminate and integrate them do not demand any chemicals except for water, and their original substrates can be recycled for subsequent growths, ensuring excellent chemical benignity and process sustainability.

3.
Microsyst Nanoeng ; 6: 103, 2020.
Artigo em Inglês | MEDLINE | ID: mdl-34567712

RESUMO

The realization of truly unclonable identification and authentication tags is the key factor in protecting the global economy from an ever-increasing number of counterfeit attacks. Here, we report on the demonstration of nanoscale tags that exploit the electromechanical spectral signature as a fingerprint that is characterized by inherent randomness in fabrication processing. Benefiting from their ultraminiaturized size and transparent constituents, these clandestine nanoelectromechanical tags provide substantial immunity to physical tampering and cloning. Adaptive algorithms are developed for digital translation of the spectral signature into binary fingerprints. A large set of tags fabricated in the same batch is used to estimate the entropy of the corresponding fingerprints with high accuracy. The tags are also examined under repetitive measurements and temperature variations to verify the consistency of the fingerprints. These experiments highlight the potential of clandestine nanoelectromechanical tags for the realization of secure identification and authentication methodologies applicable to a wide range of products and consumer goods.

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