Flow-Independent Thermal Conductivity and Volumetric Heat Capacity Measurement of Pure Gases and Binary Gas Mixtures Using a Single Heated Wire.

Among the different techniques for monitoring the flow rate of various fluids, thermal flow sensors stand out for their straightforward measurement technique. However, the main drawback of these types of sensors is their dependency on the thermal properties of the medium, i.e., thermal conductivity (k), and volumetric heat capacity (ρcp). They require calibration whenever the fluid in the system changes. In this paper, we present a single hot wire suspended above a V-groove cavity that is used to measure k and ρcp through DC and AC excitation for both pure gases and binary gas mixtures, respectively. The unique characteristic of the proposed sensor is its independence of the flow velocity, which makes it possible to detect the medium properties while the fluid flows over the sensor chip. The measured error due to fluctuations in flow velocity is less than ±0.5% for all test gases except for He, where it is ±6% due to the limitations of the measurement setup. The working principle and measurement results are discussed.

Compact Micro-Coriolis Mass-Flow Meter with Optical Readout.

This paper presents the first nickel-plated micro-Coriolis mass-flow sensor with integrated optical readout. The sensor consists of a freely suspended tube made of electroplated nickel with a total length of 60 mm, an inner diameter of 580 µm, and a wall thickness of approximately 8 µm. The U-shaped tube is actuated by Lorentz forces. An optical readout consisting of two LEDs and two phototransistors is used to detect the tube motion. Mass-flow measurements were performed at room temperature with water and isopropyl alcohol for flows up to 200 g/h and 100 g/h, respectively. The measured resonance frequencies were 1.67 kHz and 738 Hz for water and 1.70 kHz and 752 Hz for isopropyl alcohol for the twist and swing modes, respectively. The measured phase shift between the two readout signals shows a linear response to mass flow with very similar sensitivities for water and isopropyl alcohol of 0.41mdegg/h and 0.43 mdegg/h, respectively.

Thermal Flow Meter with Integrated Thermal Conductivity Sensor.

This paper presents a novel gas-independent thermal flow sensor chip featuring three calorimetric flow sensors for measuring flow profile and direction within a tube, along with a single-wire flow independent thermal conductivity sensor capable of identifying the gas type through a simple DC voltage measurement. All wires have the same dimensions of 2000 µm in length, 5 µm in width, and 1.2 µm in thickness. The design theory and COMSOL simulation are discussed and compared with the measurement results. The sensor's efficacy is demonstrated with different gases, He, N2, Ar, and CO2, for thermal conductivity and thermal flow measurements. The sensor can accurately measure the thermal conductivity of various gases, including air, enabling correction of flow rate measurements based on the fluid type. The measured voltage from the thermal conductivity sensor for air corresponds to a calculated thermal conductivity of 0.02522 [W/m·K], with an error within 2.9%.

Modeling, Fabrication, and Testing of a 3D-Printed Coriolis Mass Flow Sensor.

This paper presents the modeling, fabrication, and testing of a 3D-printed Coriolis mass flow sensor. The sensor contains a free-standing tube with a circular cross-section printed using the LCD 3D-printing technique. The tube has a total length of 42 mm, an inner diameter of about 900 µm, and a wall thickness of approximately 230 µm. The outer surface of the tube is metalized using a Cu plating process, resulting in a low electrical resistance of 0.5 Ω. The tube is brought into vibration using an AC current in combination with a magnetic field from a permanent magnet. The displacement of the tube is detected using a laser Doppler vibrometer (LDV) that is part of a Polytec MSA-600 microsystem analyzer. The Coriolis mass flow sensor has been tested over a flow range of 0-150 g/h for water, 0-38 g/h for isopropyl alcohol (IPA), and 0-50 g/h for nitrogen. The maximum flow rates of water and IPA resulted in less than a 30 mbar pressure drop. The pressure drop at the maximum flow rate of nitrogen is 250 mbar.

Development of Soft sEMG Sensing Structures Using 3D-Printing Technologies.

3D printing of soft EMG sensing structures enables the creation of personalized sensing structures that can be potentially integrated in prosthetic, assistive and other devices. We developed and characterized flexible carbon-black doped TPU-based sEMG sensing structures. The structures are directly 3D-printed without the need for an additional post-processing step using a low-cost, consumer grade multi-material FDM printer. A comparison between the gold standard Ag/AgCl gel electrodes and the 3D-printed EMG electrodes with a comparable contact area shows that there is no significant difference in the EMG signals' amplitude. The sensors are capable of distinguishing a variable level of muscle activity of the biceps brachii. Furthermore, as a proof of principle, sEMG data of a 3D-printed 8-electrode band are analyzed using a patten recognition algorithm to recognize hand gestures. This work shows that 3D-printed sEMG electrodes have great potential in practical applications.

Heavily-Doped Bulk Silicon Sidewall Electrodes Embedded between Free-Hanging Microfluidic Channels by Modified Surface Channel Technology.

Surface Channel Technology is known as the fabrication platform to make free-hanging microchannels for various microfluidic sensors and actuators. In this technology, thin film metal electrodes, such as platinum or gold, are often used for electrical sensing and actuation purposes. As a result that they are located at the top surface of the microfluidic channels, only topside sensing and actuation is possible. Moreover, in microreactor applications, high temperature degradation of thin film metal layers limits their performance as robust microheaters. In this paper, we report on an innovative idea to make microfluidic devices with integrated silicon sidewall electrodes, and we demonstrate their use as microheaters. This is achieved by modifying the original Surface Channel Technology with optimized mask designs. The modified technology allows to embed heavily-doped bulk silicon electrodes in between the sidewalls of two adjacent free-hanging microfluidic channels. The bulk silicon electrodes have the same electrical properties as the extrinsic silicon substrate. Their cross-sectional geometry and overall dimensions can be designed by optimizing the mask design, hence the resulting resistance of each silicon electrode can be customized. Furthermore, each silicon electrode can be electrically insulated from the silicon substrate. They can be designed with large cross-sectional areas and allow for high power dissipation when used as microheater. A demonstrator device is presented which reached 119 . 4 ∘ C at a power of 206 . 9 m W , limited by thermal conduction through the surrounding air. Other potential applications are sensors using the silicon sidewall electrodes as resistive or capacitive readout.

Monitoring phase transition of aqueous biomass model substrates by high-pressure and high-temperature microfluidics.

Aqueous-Phase Reforming (APR) is a promising hydrogen production method, where biomass is catalytically reformed under high pressure and high temperature reaction conditions. To eventually study APR, in this paper, we report a high-pressure and high-temperature microfluidic platform that can withstand temperatures up to 200°C and pressures up to 30 bar. As a first step, we studied the phase transition of four typical APR biomass model solutions, consisting of 10 wt% of ethylene glycol, glycerol, xylose or xylitol in MilliQ water. After calibration of the set-up using pure MilliQ water, a small increase in boiling point was observed for the ethylene glycol, xylitol and xylose solutions compared to pure water. Phase transition occurred through either explosive or nucleate boiling mechanisms, which was monitored in real-time in our microfluidic device. In case of nucleate boiling, the nucleation site could be controlled by exploiting the pressure drop along the microfluidic channel. Depending on the void fraction, various multiphase flow patterns were observed simultaneously. Altogether, this study will not only help to distinguish between bubbles resulting from a phase transition and/or APR product formation, but is also important from a heat and mass transport perspective.

New type of microengine using internal combustion of hydrogen and oxygen.

Microsystems become part of everyday life but their application is restricted by lack of strong and fast motors (actuators) converting energy into motion. For example, widespread internal combustion engines cannot be scaled down because combustion reactions are quenched in a small space. Here we present an actuator with the dimensions 100 × 100 × 5 µm(3) that is using internal combustion of hydrogen and oxygen as part of its working cycle. Water electrolysis driven by short voltage pulses creates an extra pressure of 0.5-4 bar for a time of 100-400 µs in a chamber closed by a flexible membrane. When the pulses are switched off this pressure is released even faster allowing production of mechanical work in short cycles. We provide arguments that this unexpectedly fast pressure decrease is due to spontaneous combustion of the gases in the chamber. This actuator is the first step to truly microscopic combustion engines.

Transient nanobubbles in short-time electrolysis.

Water electrolysis in a microsystem is observed and analyzed on a short-time scale of ∼10 µs. The very unusual properties of the process are stressed. An extremely high current density is observed because the process is not limited by the diffusion of electroactive species. The high current is accompanied by a high relative supersaturation, S > 1000, that results in homogeneous nucleation of bubbles. On the short-time scale only nanobubbles can be formed. These nanobubbles densely cover the electrodes and aggregate at a later time to microbubbles. The effect is significantly intensified with a small increase of temperature. Application of alternating polarity voltage pulses produces bubbles containing a mixture of hydrogen and oxygen. Spontaneous reaction between gases is observed for stoichiometric bubbles with sizes smaller than ∼150 nm. Such bubbles disintegrate violently affecting the surfaces of the electrodes.

3D nanofabrication of fluidic components by corner lithography.

A reproducible wafer-scale method to obtain 3D nanostructures is investigated. This method, called corner lithography, explores the conformal deposition and the subsequent timed isotropic etching of a thin film in a 3D shaped silicon template. The technique leaves a residue of the thin film in sharp concave corners which can be used as structural material or as an inversion mask in subsequent steps. The potential of corner lithography is studied by fabrication of functional 3D microfluidic components, in particular i) novel tips containing nano-apertures at or near the apex for AFM-based liquid deposition devices, and ii) a novel particle or cell trapping device using an array of nanowire frames. The use of these arrays of nanowire cages for capturing single primary bovine chondrocytes by a droplet seeding method is successfully demonstrated, and changes in phenotype are observed over time, while retaining them in a well-defined pattern and 3D microenvironment in a flat array.