Highly reflective Ru/Y multilayer mirrors for the spectral range of 9-11†nm.

The results of the investigation of the reflective characteristics of multilayer mirrors based on Ru/Y are presented. Reflection coefficients at the level of 38.5% at an operating wavelength of 9.4 nm. It is shown that the deposition of B4C barrier layers onto Y layers makes it possible to significantly increase the reflection coefficient compared to structures without barrier layers. A reflectance of 54% was obtained for mirrors optimized for 11.4 nm, which is close to the theoretical limit for these materials.

Soft X-ray Reflection Spectroscopy for Nano-Scaled Layered Structure Materials.

We introduce a novel approach that addresses the probing of interfacial structural phenomena in layered nano-structured films. The approach combines resonant soft x-ray reflection spectroscopy at grazing incidence near the "critical angle" with angular dependent reflection at energies around the respective absorption edges. Dynamic scattering is considered to determine the effective electron density and hence chemically resolved atomic profile across the structure based on simultaneous data analysis. We demonstrate application of the developed technique on the layered model structure C (20 Å)/B (40 Å)/Si (300 Å)/W (10 Å)/substrate. We precisely quantify atomic migration across the interfaces, a few percent of chemical changes of materials and the presence of impurities from top to the buried interfaces. The results obtained reveal the sensitivity of the approach towards resolving the compositional differences up to a few atomic percent. The developed approach enables the reconstruction of a highly spatio-chemically resolved interfacial map of complex nano-scaled interfaces with technical relevance to many emerging applied research fields.

Influence of barrier interlayers on the performance of Mo/Be multilayer mirrors for next-generation EUV lithography.

A comparative study was carried out of the structure and reflection performance of four types of multilayer mirror for extreme ultraviolet lithography at 11.2 nm; these were a pure Mo/Be structure and three Mo/Be-based structures with thin B4C, C and Si interlayers. It was demonstrated that Mo/Be mirrors show maximum reflectance at normal incidence, while maximum structural perfection is shown by Mo/Be/Si mirrors. The introduction of B4C and C layers into the structure increases the interlayer roughness and reduces the sharpness of the interfaces, adversely affecting the target coating characteristics. Results are presented for studies using four techniques: X-ray reflectometry, small-angle X-ray scattering, atomic force microscopy, and transmission electron microscopy.

Gratings for synchrotron and FEL beamlines: a project for the manufacture of ultra-precise gratings at Helmholtz Zentrum Berlin.

Blazed gratings are of dedicated interest for the monochromatization of synchrotron radiation when a high photon flux is required, such as, for example, in resonant inelastic X-ray scattering experiments or when the use of laminar gratings is excluded due to too high flux densities and expected damage, for example at free-electron laser beamlines. Their availability became a bottleneck since the decommissioning of the grating manufacture facility at Carl Zeiss in Oberkochen. To resolve this situation a new technological laboratory was established at the Helmholtz Zentrum Berlin, including instrumentation from Carl Zeiss. Besides the upgraded ZEISS equipment, an advanced grating production line has been developed, including a new ultra-precise ruling machine, ion etching technology as well as laser interference lithography. While the old ZEISS ruling machine GTM-6 allows ruling for a grating length up to 170 mm, the new GTM-24 will have the capacity for 600 mm (24 inch) gratings with groove densities between 50 lines mm-1 and 1200 lines mm-1. A new ion etching machine with a scanning radiofrequency excited ion beam (HF) source allows gratings to be etched into substrates of up to 500 mm length. For a final at-wavelength characterization, a new reflectometer at a new Optics beamline at the BESSY-II storage ring is under operation. This paper reports on the status of the grating fabrication, the measured quality of fabricated items by ex situ and in situ metrology, and future development goals.

Efficient high-order suppression system for a metrology beamline.

High-quality metrology with synchrotron radiation requires in particular a very high spectral purity of the incident beam. This is usually achieved by a set of transmission filters with suitable absorption edges to suppress high-order radiation of the monochromator. The at-wavelength metrology station at a BESSY-II bending-magnet collimated plane-grating monochromator (c-PGM) beamline has recently commissioned a high-order suppression system (HiOS) based on four reflections from mirrors which can be inserted into the beam path. Two pairs of mirrors are aligned parallel so as not to disturb the original beam path and are rotated clockwise and counter-clockwise. Three sets of coatings are available for the different energy ranges and the incidence angle is freely tunable to find the optimum figure of merit for maximum suppression at maximum transmission for each photon energy required. Measured performance results of the HiOS for the EUV and XUV range are compared with simulations, and applications are discussed.

Highly efficient blazed grating with multilayer coating for tender X-ray energies.

For photon energies of 1 - 5 keV, blazed gratings with multilayer coating are ideally suited for the suppression of stray and higher orders light in grating monochromators. We developed and characterized a blazed 2000 lines/mm grating coated with a 20 period Cr/C- multilayer. The multilayer d-spacing of 7.3 nm has been adapted to the line distance of 500 nm and the blaze angle of 0.84° in order to provide highest efficiency in the photon energy range between 1.5 keV and 3 keV. Efficiency of the multilayer grating as well as the reflectance of a witness multilayer which were coated simultaneously have been measured. An efficiency of 35% was measured at 2 keV while a maximum efficiency of 55% was achieved at 4 keV. In addition, a strong suppression of higher orders was observed which makes blazed multilayer gratings a favorable dispersing element also for the low X-ray energy range.

At-wavelength metrology facility for soft X-ray reflection optics.

A new Optics Beamline coupled to a versatile UHV reflectometer is successfully operating at BESSY-II. It is used to carry out at-wavelength characterization and calibration of in-house produced gratings and novel nano-optical devices as well as mirrors and multilayer systems in the UV and XUV spectral region. This paper presents most recent commissioning data of the beamline and shows their correlation with initial beamline design calculations. Special attention is paid to beamline key parameters which determine the quality of the measurements such as high-order suppression and stray light behavior. The facility is open to user operation.

The at-wavelength metrology facility for UV- and XUV-reflection and diffraction optics at BESSY-II.

A technology center for the production of high-precision reflection gratings has been established. Within this project a new optics beamline and a versatile reflectometer for at-wavelength characterization of UV- and XUV-reflection gratings and other (nano-) optical elements has been set up at BESSY-II. The Plane Grating Monochromator beamline operated in collimated light (c-PGM) is equipped with an SX700 monochromator, of which the blazed gratings (600 and 1200 lines mm(-1)) have been recently exchanged for new ones of improved performance produced in-house. Over the operating range from 10 to 2000 eV this beamline has very high spectral purity achieved by (i) a four-mirror arrangement of different coatings which can be inserted into the beam at different angles and (ii) by absorber filters for high-order suppression. Stray light and scattered radiation is removed efficiently by double sets of in situ exchangeable apertures and slits. By use of in- and off-plane bending-magnet radiation the beamline can be adjusted to either linear or elliptical polarization. One of the main features of a novel 11-axes reflectometer is the possibility to incorporate real life-sized gratings. The samples are adjustable within six degrees of freedom by a newly developed UHV-tripod system carrying a load up to 4 kg, and the reflectivity can be measured between 0 and 90° incidence angle for both s- and p-polarization geometry. This novel powerful metrology facility has gone into operation recently and is now open for external users. First results on optical performance and measurements on multilayer gratings will be presented here.

Potential Remedies for the High Synchrotron-Radiation-Induced Heat Load for Future Highest-Energy-Proton Circular Colliders.

We propose a new method for handling the high synchrotron radiation (SR) induced heat load of future circular hadron colliders (like FCC-hh). FCC-hh are dominated by the production of SR, which causes a significant heat load on the accelerator walls. Removal of such a heat load in the cold part of the machine, as done in the Large Hadron Collider, will require more than 100 MW of electrical power and a major cooling system. We studied a totally different approach, identifying an accelerator beam screen whose illuminated surface is able to forward reflect most of the photons impinging onto it. Such a reflecting beam screen will transport a significant part of this heat load outside the cold dipoles. Then, in room temperature sections, it could be more efficiently dissipated. Here we will analyze the proposed solution and address its full compatibility with all other aspects an accelerator beam screen must fulfill to keep under control beam instabilities as caused by electron cloud formation, impedance, dynamic vacuum issues, etc. If experimentally fully validated, a highly reflecting beam screen surface will provide a viable and solid solution to be eligible as a baseline design in FCC-hh projects to come, rendering them more cost effective and sustainable.

Profiling the interface electron gas of LaAlO3/SrTiO3 heterostructures with hard x-ray photoelectron spectroscopy.

The conducting interface of LaAlO3/SrTiO3 heterostructures has been studied by hard x-ray photoelectron spectroscopy. From the Ti 2p signal and its angle dependence we derive that the thickness of the electron gas is much smaller than the probing depth of 4 nm and that the carrier densities vary with increasing number of LaAlO3 overlayers. Our results point to an electronic reconstruction in the LaAlO3 overlayer as the driving mechanism for the conducting interface and corroborate the recent interpretation of the superconducting ground state as being of the Berezinskii-Kosterlitz-Thouless type.

Broad angular multilayer analyzer for soft X-rays.

Using numerical optimization algorithm, non-periodic Mo/Si, Mo/Be, and Ni/C broad angular multilayer analyzers have been designed. At the wavelength of 13 nm and the angular range of 45~49 degrees , the Mo/Si and Mo/Be multilayer can provide the plateau s-reflectivity of 65% and 45%, respectively. At 5.7 nm, the s-reflectivity of Ni/C multilayer is 16% in the 44~46 degrees range. The non-periodic Mo/Si broad angular multilayer was also fabricated using DC magnetron sputtering, and characterized using the soft X-ray polarimeter at BESSY. The s-reflectivity is higher than 45.6% over the angular range of 45~49 degrees at 13 nm, where, the degree of polarization is more than 99.98%.

Sample preserving deep interface characterization technique.

We propose a nondestructive technique based on atomic core-level shifts to characterize the interface quality of thin film nanomaterials. Our method uses the inherent sensitivity of the atomic core-level binding energies to their local surroundings in order to probe the layer-resolved binary alloy composition profiles at deeply embedded interfaces. From an analysis based upon high energy x-ray photoemission spectroscopy and density functional theory of a Ni/Cu fcc (100) model system, we demonstrate that this technique is a sensitive tool to characterize the sharpness of a buried interface. We performed controlled interface tuning by gradually approaching the diffusion temperature of the multilayer, which lead to intermixing. We show that core-level spectroscopy directly reflects the changes in the electronic structure of the buried interfaces, which ultimately determines the functionality of the nanosized material.

Comparative study of root-canal preparation using Lightspeed and Quantec SC rotary NiTi instruments.

AIM: To compare several parameters of root-canal preparation using two different rotary nickel-titanium (NiTi) instruments: Lightspeed (Lightspeed Inc, San Antonio, TX, USA) and Quantec SC (Tycom, Irvine, USA). METHODOLOGY: Fifty extracted mandibular molars with root-canal curvatures between 20 degrees and 40 degrees were embedded into a muffle system. All root canals were prepared to size 45 followed by a stepback in 1-mm increments to size 70 (Lightspeed) or 45 (Quantec SC), using a high-torque motor at 1300 or 350 r.p.m. respectively. In both groups, irrigation was performed with 2 mL NaOCl (3%) after each instrument size. RC-Prep (Premier, PA, USA) was used as a chelating agent. The following parameters were evaluated: straightening of curved root canals, postoperative root-canal diameter, working safety (instrument fractures, perforations, apical blockages, loss of working length (WL)), cleaning ability and working time. Cleanliness of the root-canal walls was investigated under SEM using 5-score indices for debris and smear layer. Statistical analysis was performed using the Wilcoxon's test (P < 0.05) for straightening and Fisher's exact test (P < 0.05) for comparison of cross-sections, contact between pre- and postoperative diameter, root-canal cleanliness and working time. RESULTS: Both NiTi systems maintained the curvature well: the mean degree of straightening was 1.8 degrees for Lightspeed and 1.7 degrees for Quantec SC; differences were not significant. Procedural incidents occurred with Quantec SC in 12 root canals (three fractures, four apical blockages and five cases of loss of WL), preparation with Lightspeed resulted in five fractures, one apical blockage and five cases of loss of WL (11 incidents). Following preparation with Lightspeed, 55.5% of the root canals had a round diameter, 25% an oval and 19.5% an irregular diameter; Quantec SC preparations resulted in a round diameter in 51.5%, oval shape in 33.3% and irregular cross-sections in 15.2% of the cases. Mean working time was similar for Quantec SC (161 s) and Lightspeed (155 s); the difference was not significant. For debris, Lightspeed and Quantec achieved 64 and 63% for scores 1 and 2, respectively. For smear layer, Lightspeed and Quantec achieved only 13.3 and 27.4% for scores 1 and 2, respectively. Differences were not significant for either debris or smear layer. CONCLUSIONS: Both systems respected original root-canal curvature well and prepared acceptable diameter forms. The cleaning ability was judged not satisfactory for both systems. Both systems showed deficiencies in working safety.

Short-period multilayer X-ray mirrors.

Multilayer structures with short periods have been systematically investigated using a tunable soft X-ray synchrotron, BESSY II, and X-ray tube radiation. Multilayer X-ray mirrors of W/B(4)C, W/Sc, Mo/B(4)C, Mo/C, La/B(4)C, Cr/C and Cr/Sc, with periods from 0.8 nm to 3.5 nm and number of periods up to 300-400, were constructed and investigated. The high reflectivity and spectral resolution of the mirrors allow them to be used to create multimirror systems for X-ray diagnostics of high-temperature plasma, for X-ray astronomy and microscopy.

A comparative study of root canal preparation using FlexMaster and HERO 642 rotary Ni-Ti instruments.

AIM: To compare several parameters of root canal preparation using two different rotary nickel-titanium (Ni-Ti) instruments: FlexMaster (VDW, Munich, Germany) and HERO 642 (Micro-Mega, Besançon, France). METHODOLOGY: Fifty extracted human mandibular molars with root canal curvatures between 20 and 40 degrees were embedded into a muffle system. All root canals were prepared to size 45 using a high-torque motor with two different Ni-Ti instruments, FlexMaster and HERO 642. In both groups, irrigation was performed with 2 mL NaOCl (3%) after each instrument size. RC-Prep (Premier, Philadelphia, USA) was used as a chelating agent with each instrument. The following parameters were evaluated: straightening of curved root canals, postoperative root canal diameter, working safety (file fractures, perforations, apical blockages, loss of working length), cleaning ability and working time. Statistical analysis was performed using the Wilcoxon's test (P < 0.05) for straightening and Fishers's exact test (P < 0.05) for comparison of cross-sections, contact between pre- and postoperative diameter, root canal cleanliness and working time. RESULTS: Both Ni-Ti systems maintained the curvature well: the mean degree of straightening was 0.6 degrees for FlexMaster and 0.5 degrees for HERO 642. One file was fractured with the FlexMaster system, but further procedural incidents were not recorded. Following preparation with FlexMaster, 18% of the root canals had a round diameter, 53% an oval diameter and 29% an irregular diameter; HERO 642 preparations resulted in a round diameter in 25%, oval shape in 47% and irregular cross-sections in 28% of the cases. Mean working time was shorter for HERO 642 (66.0 s) than for FlexMaster (71.1 s). Cleanliness of the root canal walls was investigated under the SEM using 5-score indices for debris and smear layer. For debris, HERO 642 and FlexMaster achieved 73 and 70% scores of 1 and 2, respectively. The results for smear layer were similar: HERO 642 and FlexMaster achieved 33 and 26% scores of 1 and 2, respectively. Significant differences between the two systems were not detected for any of the parameters evaluated. CONCLUSIONS: Both systems respected original root canal curvature well and were safe. Both systems failed to remove debris and smear layer in the majority of the cases.

Quality of preparation of oval distal root canals in mandibular molars using nickel-titanium instruments.

AIM: The aim of this study was to compare the preparation of oval distal root canals in mandibular molars using three different nickel-titanium (NiTi) instruments: Lightspeed (Lightspeed Inc., San Antonio, TX, USA). ProFile .04 (Maillefer Ballaigues. Switzerland) and Quantec SC (Tycom, Irvine, CA, USA). METHODOLOGY: Three groups of 20 extracted mandibular molars with oval distal root canals were embedded in a muffle system as described by Bramante et al. (1987) and modified by Hülsmann et al. (1999). Preparation of the root canals was performed with particular emphasis on the buccal and lingual extensions of the oval shape. The following parameters were evaluated: comparison of pre- and postoperative photographs with regard to the buccal and lingual extensions of the preparation, safety issues (file fractures, perforations, apical blockages, loss of working length), cleaning ability (SEM investigated using a 5-score system for remaining debris and smear layer) and working time. RESULTS: Superimposition of pre- and postoperative cross-sections in the majority of specimens revealed uninstrumented or incompletely instrumented buccal or lingual extensions (Lightspeed and Quantec SC, 56.7%; ProFile .04, 55%) For debris removal, Quantec SC achieved the best results (54.2% scores 1 and 2), followed by ProFile .04 (52.5%) and Lightspeed (46.7%). Preparation resulted in substantial smear layer covering the canal walls for every system (ProFile .04, 38.3%; Quantec SC, 36.6%; Lightspeed, 28.3%). Differences between the three systems were not significant for any of the parameters investigated. Preparation with Lightspeed resulted in two fractured instruments; with Quantec SC. two apical blockages occurred. With ProFile .04, no complications were noticed. Mean working time was shorter for ProFile .04 (261.2 s) than for Quantec SC (272.4 s) and Lightspeed (338.9 s); the differences were not significant. CONCLUSIONS: The flexibility of the NiTi instruments investigated in this study did not allow controlled preparation of the buccal and lingual extensions of oval root canals. The instruments frequently produced a circular bulge in the canal whilst the buccal and lingual extensions remained unprepared, leaving smear layer and debris.

Comparative in-vitro evaluation of three chelator pastes.

AIM: To compare the effect of three paste chelating agents on the root dentine of extracted teeth: Calcinase-Slide (lege artis, Dettenhausen, Germany), Glyde-File (DeTrey/Dentsply, Konstanz, Germany), RC-Prep (Premier, Norristown, USA). METHODOLOGY: Ten slices of root dentine were covered with one of the chelating agents for 30 s, 1 min and 2 min and irrigated with 5 mL H2O2 and NaOCl. This was repeated five times. Pre- and postoperative Vickers hardness of root dentine was measured. Twenty slices of root dentine were covered with 0.1 mL of the chelating agents for 3, 6 and 9 min. Differences between pre- and postoperative weight were recorded. Ten root canals of extracted teeth were enlarged five ISO-sizes with 0.1 mL chelator paste for each file. The teeth were split longitudinally and cleanliness of the root-canal walls was evaluated under the SEM using a four-score evaluation index. Results were statistically analysed using the Wilcoxon-Mann-Whitney test, the Friedman test and the Kruskal-Wallis test with P<0.05 for all tests. RESULTS: No significant differences between the chelating agents were found in terms of changes in dentine hardness. Loss of hardness increased significantly with increasing time of contact of the chelating pastes with dentine. There were significant differences between the three chelating agents and the control for loss of weight. After 3 min there was no significant difference between the chelating agents, after 6 and 9 min Calcinase-Slide showed significantly more weight loss than RC-Prep; after 6 min Glyde-File showed significantly more weight loss than RC-Prep. In the coronal and middle parts of the root canals, the cleaning ability of Calcinase-Slide was significantly better than of RC-Prep and Glyde-File; in the apical third no differences could be found. CONCLUSIONS: Under the circumstances of this in vitro study, the three chelator pastes evaluated had no or only slight differences in terms of weight loss, changes of Vickers hardness in root dentine and cleanliness of root-canal walls. The use of a chelating agent may be useful to enhance cleanliness of the coronal and middle part of the root canal.

A comparative study of root canal preparation using Profile .04 and Lightspeed rotary Ni-Ti instruments.

AIM: The purpose of this Study was to compare several parameters of root canal preparation using two different rotary nickel-titanium instruments: ProFile .04 (Dentsply/ Maillefer, Ballaigues, Switzerland) and Lightspeed (Lightspeed Technology Inc., San Antonio, TX, USA). METHODOLOGY: Fifty extracted mandibular molars with root canal curvatures between 20 degrees and 40 degrees were divided into two similar groups having equal mean curvatures. The teeth were then embedded into a muffle system as described by Bramante et al. (1987) and modified by Hülsmann et al. (1999b). All root canals were prepared using ProFile .04 or Lightspeed Ni-Ti instruments to size 45 following the manufacturers' instructions. The Lightspeed system was used in a step-back technique: ProFile .04 instruments were used in a crown-down technique. The following parameters were evaluated: straightening of curved root canals (superimposition of pre- and postoperative radiographs), postoperative root canal diameter (superimposition of pre- and postoperative photographs of root canal cross-sections), safety issues (file fractures. perforations, apical blockages, loss of working length) (protocol), cleaning ability (SEM-evaluation of root canal walls using a five-score system for debris and smear layer), and working time (protocol). Statistical analysis was performed using the Wilcoxon test (P < 0.05) for straightening, and Fisher's exact-test (P < 0.05) for comparison of cross-sections, for comparison of contact between pre- and postoperative diameter, root canal cleanliness and working time. RESULTS: Both Ni-Ti systems maintained curvature well; the mean degree of straightening was less than 1 degrees for both ProFile .04 and for Lightspeed with no statistical significance between the groups. Most procedural incidents occurred with Profile .04 instruments (three fractures), Lightspeed preparation was completed without instrument fractures. Loss of working length, perforations or apical blockage did not occur with either instrument. Following preparation with Profile.04. 64.0% of the root canals had a round, 30.7% an oval, and 5.3% an irregular cross-section, Lightspeed preparation resulted in a round cross-section in 41.3% of cases, an oval shape in 45.3% of cases: 13.3% of cases had an irregular cross-section. No significant differences were found between the two systems. Lightspeed instruments enlarged the root canal more uniformly with no specimen showing 50% or more contact between pre- and postoperative diameter. The difference was statistically significant only for the coronal third of the root canals (P = 0.032). Mean working time was significantly shorter for Profile .04 (105 s) than for Lightspeed (140 s) (P = 0.02). For debris removal Lightspeed achieved the best results (68% scores 1 and 2), followed by Profile .04 (48.4%) with no significant differences between the systems. The results for remaining smear layer were similar: the lowest amount of smear layer on the root canal walls was found after preparation with Lightspeed (30.7% scores 1 and 2). followed by Profile.04 (23.1%). In the coronal third of the root canals Lightspeed performed significantly better than Profile .04 (P = 0.029): in the middle and apical third the differences were not significant. CONCLUSIONS: Both systems under investigation respected original root canal curvature and were safe to use. Both systems can be recommended for clinical use.