Cavity-agnostic acoustofluidic manipulations enabled by guided flexural waves on a membrane acoustic waveguide actuator.

This article presents an in-depth exploration of the acoustofluidic capabilities of guided flexural waves (GFWs) generated by a membrane acoustic waveguide actuator (MAWA). By harnessing the potential of GFWs, cavity-agnostic advanced particle manipulation functions are achieved, unlocking new avenues for microfluidic systems and lab-on-a-chip development. The localized acoustofluidic effects of GFWs arising from the evanescent nature of the acoustic fields they induce inside a liquid medium are numerically investigated to highlight their unique and promising characteristics. Unlike traditional acoustofluidic technologies, the GFWs propagating on the MAWA's membrane waveguide allow for cavity-agnostic particle manipulation, irrespective of the resonant properties of the fluidic chamber. Moreover, the acoustofluidic functions enabled by the device depend on the flexural mode populating the active region of the membrane waveguide. Experimental demonstrations using two types of particles include in-sessile-droplet particle transport, mixing, and spatial separation based on particle diameter, along with streaming-induced counter-flow virtual channel generation in microfluidic PDMS channels. These experiments emphasize the versatility and potential applications of the MAWA as a microfluidic platform targeted at lab-on-a-chip development and showcase the MAWA's compatibility with existing microfluidic systems.

Microfabricated acoustofluidic membrane acoustic waveguide actuator for highly localized in-droplet dynamic particle manipulation.

Precision manipulation techniques in microfluidics often rely on ultrasonic actuators to generate displacement and pressure fields in a liquid. However, strategies to enhance and confine the acoustofluidic forces often work against miniaturization and reproducibility in fabrication. This study presents microfabricated piezoelectric thin film membranes made via silicon diffusion for guided flexural wave generation as promising acoustofluidic actuators with low frequency, voltage, and power requirements. The guided wave propagation can be dynamically controlled to tune and confine the induced acoustofluidic radiation force and streaming. This provides for highly localized dynamic particle manipulation functionalities such as multidirectional transport, patterning, and trapping. The device combines the advantages of microfabrication and advanced acoustofluidic capabilities into a miniature "drop-and-actuate" chip that is mechanically robust and features a high degree of reproducibility for large-scale production. The membrane acoustic waveguide actuators offer a promising pathway for acoustofluidic applications such as biosensing, organoid production, and in situ analyte transport.