High accuracy cross-sectional shape analysis by coherent soft x-ray diffraction.

When the scatterer size is less than 100 wavelengths, the effect of diffraction is large. The analysis of diffraction is important for 3D shape measurement. However, in soft x rays, shapes suitable for rigorous diffraction analysis have been limited to ellipses and periodic structures. We have developed a method to expand this to any shape (isolated triangle, rectangle, etc.). Experimentally, we measured the respective widths of the cross section of a column consisting of two layers and showed that the resolution was at least a few wavelengths. For this purpose, we have also developed a fast simulation method with a small memory size.