Quantification and mitigation of the effect of resynchronization errors in ultrasound sensor network for passive imaging in elastic plates.

The problem of signal desynchronization in passive imaging based on noise correlation for defect detection in elastic plates is investigated. Although a post-processing resynchronization process relying on the symmetry of noise correlation functions can be applied prior to the imaging algorithm, perfect synchronization might not be achieved experimentally. Effect of such residual synchronization errors on the defect detection performance is quantified as a function of their probability density function. A mathematical regularization process is then proposed to reduce the standard deviation of the resynchronization errors by a factor of N-1/N (N is the number of sensors), which results in a significant improvement in the detection performance. Finally, these theoretical results are validated through a simple flexural-wave propagation simulation.

Dispersion of surface acoustic waves in thin films at extreme wavelength-to-thickness ratios.

Surface acoustic waves (SAWs) are sensitive to the presence of a layer on the surface of a material, even if this layer is extremely thin compared to their wavelengths. Given the very slow propagation velocities of SAWs compared to electromagnetic waves, their wavelengths are on the order of 40 µm for acoustic frequencies on the order of 100 MHz. However, it has been shown that these waves are dispersive for coatings whose thicknesses are more than 1000 times smaller than their wavelength. This sensitivity is verified by studying the dispersion of SAWs for a frequency range between 90 and 260 MHz.

Electrical and Optical Characterization of SAW Sensors Coated with Parylene C and Their Analysis Using the Coupling-of-Modes (COM) Theory.

In this paper, we present how complementary characterization techniques, such as electrical measurements with a vector network analyzer (VNA), optical measurements with a laser Doppler vibrometer (LDV), and numerical simulations with the finite element method, coupled with spectral domain analysis (FEMSDA), allow us to independently access different properties of a SAW device and fully characterize its operation using the coupling-of-modes theory (COM). A set of chemical SAW sensors coated with parylene C layers of different thicknesses (1, 1.5, and 2 µm) and an uncoated sensor were used as test samples. The sensors represent dual-channel electroacoustic delay lines operating in the vicinity of 77 MHz. The IDTs consist of split aluminum electrodes deposited on a AT-cut quartz substrate. The thickness-dependent influence of the parylene C layer was observed on the operating frequency (SAW velocity), static capacitance, attenuation, crosstalk, and reflection coefficient. COM parameters were reported for the four cases considered; measured and simulated data show good agreement. The presented approach is suitable for the design, characterization, and validation of polymer film-coated SAW sensors.

Development of a Broadband (100-240 MHz) Surface Acoustic Wave Emitter Devoted to the Non-Destructive Characterization of Sub-Micrometric Thin Films.

In the ultrasonic non-destructive evaluation of thin films, it is essential to have ultrasonic transducers that are able to generate surface acoustic waves (SAW) of suitably high frequencies in a wide frequency range of between ten and several hundred megahertz. If the characterization is carried out with the transducer in contact with the sample, it is also necessary that the transducers provide a high level of mechanical displacement (>100 s pm). This level allows the wave to cross the transducer−sample interface and propagate over the distance of a few millimeters on the sample and be properly detected. In this paper, an emitter transducer formed of interdigitated chirp electrodes deposited on 128° Y-cut LiNbO3 is proposed. It is shown that this solution efficiently enables the generation of SAW (displacement level up to 1 nm) in a frequency range of between 100 and 240 MHz. The electrical characterization and a displacement field analysis of SAW by laser Doppler vibrometry are presented. The transducer's significant unidirectionality is demonstrated. Finally, the characterization of two titanium thin films deposited on silicon is presented as an example. A meaningful SAW velocity dispersion (~10 m/s) is obtained, which allows for the precise estimation (5% of relative error) of the submicrometer thickness of the layers (20 and 50 nm).

Effect of Partial Ba Substitutions on the Crystallization of Sr2TiSi2O8 (STS) Glass-Ceramics and on the Generation of a SAW Signal at High Temperatures.

Because of their characteristics, including a d33 of 10-15 pC/N and high stability up to temperatures over 1000 °C, polar glass-ceramics containing fresnoite crystals can be regarded as highly effective materials for applications requiring piezoelectricity at high temperatures. In the present paper we investigate barium substitutions in an Sr-fresnoite (STS) glass-ceramic. Two aspects are studied: first, the effect of the substitution on the preferential orientation of the crystallization, and second, the ability of the glass-ceramics to generate and propagate surface acoustic waves (SAW) at high temperatures. XRD analyses show that a 10 at.% substitution of Ba allows us to keep a strong preferential orientation of the (00l) planes of the fresnoite crystals down to more than 1 mm below the surfaces. Higher substitution levels (25 and 50 at.%), induce a non-oriented volume crystallization mechanism that competes with the surface mechanism. SAW devices were fabricated from glass-ceramic substrates with 0, 10 and 25 at.% Ba substitutions. Temperature testing reveals the high stability of the frequency and delay for all of these devices. The glass-ceramic with a 10 at.% Ba substitution gives the strongest amplitude of the SAW signal. This is attributed to the high (00l) preferential orientation and the absence of disoriented volume crystallization.

Spatially selective manipulation of cells with single-beam acoustical tweezers.

Acoustical tweezers open major prospects in microbiology for cells and microorganisms contactless manipulation, organization and mechanical properties testing since they are biocompatible, label-free and have the potential to exert forces several orders of magnitude larger than their optical counterpart at equivalent power. Yet, these perspectives have so far been hindered by the absence of spatial selectivity of existing acoustical tweezers - i.e., the ability to select and move objects individually - and/or their limited resolution restricting their use to large particle manipulation only and/or finally the limited forces that they could apply. Here, we report precise selective manipulation and positioning of individual human cells in a standard microscopy environment with trapping forces up to ~200 pN without altering their viability. These results are obtained with miniaturized acoustical tweezers combining holography with active materials to synthesize specific wavefields called focused acoustical vortices designed to produce stiff localized traps with reduced acoustic power.

3D FEM Analysis of High-Frequency AlN-Based PMUT Arrays on Cavity SOI.

This paper presents three-dimensional (3D) models of high-frequency piezoelectric micromachined ultrasonic transducers (PMUTs) based on the finite element method (FEM). These models are verified with fabricated aluminum nitride (AlN)-based PMUT arrays. The 3D numerical model consists of a sandwiched piezoelectric structure, a silicon passive layer, and a silicon substrate with a cavity. Two types of parameters are simulated with periodic boundary conditions: (1) the resonant frequencies and mode shapes of PMUT, and (2) the electrical impedance and acoustic field of PMUT loaded with air and water. The resonant frequencies and mode shapes of an electrically connected PMUT array are obtained with a laser Doppler vibrometer (LDV). The first resonant frequency difference between 3D FEM simulation and the measurement for a 16-MHz PMUT is reasonably within 6%, which is just one-third of that between the analytical method and the measurement. The electrical impedance of the PMUT array measured in air and water is consistent with the simulation results. The 3D model is suitable for predicting electrical and acoustic performance and, thus, optimizing the structure of high-frequency PMUTs. It also has good potential to analyze the transmission and reception performances of a PMUT array for future compact ultrasonic systems.

Folding a focalized acoustical vortex on a flat holographic transducer: Miniaturized selective acoustical tweezers.

Acoustical tweezers based on focalized acoustical vortices hold the promise of precise contactless manipulation of millimeter down to submicrometer particles, microorganisms, and cells with unprecedented combined selectivity and trapping force. Yet, the widespread dissemination of this technology has been hindered by severe limitations of current systems in terms of performance and/or miniaturization and integrability. Here, we unleash the potential of focalized acoustical vortices by developing the first flat, compact, paired single electrode focalized acoustical tweezers. These tweezers rely on spiraling transducers obtained by folding a spherical acoustical vortex on a flat piezoelectric substrate. We demonstrate the ability of these tweezers to grab and displace micrometric objects in a standard microfluidic environment with unique selectivity. The simplicity of this system and its scalability to higher frequencies open tremendous perspectives in microbiology, microrobotics, and microscopy.

Non-destructive characterization of surfaces and thin coatings using a large-bandwidth interdigital transducer.

This paper deals with non-destructive testing of thin layer structures using Rayleigh-type waves over a broad frequency range (25-125 MHz). The dispersion phenomenon was used to characterize a layer-on-substrate-type sample comprising a thin layer of platinum 100 nm thick on a silicon substrate. The originality of this paper lies in the investigation of different ways of generating surface acoustic waves (SAWs) with large bandwidth interdigital transducers (IDTs) as well as the development of a measuring device to accurately estimate the SAW phase velocity. In particular, this study focuses on comparing the performance (in terms of SAW amplitude and bandwidth) of different excitations imposed on IDTs. The three types of excitations are burst, impulse, and chirp. The interest of chirp excitation compared to the other two types was clearly demonstrated in terms of the SAW bandwidth and amplitude of displacement. With these IDT transducers, measurements could be performed over a wide frequency band (20-125 MHz), and consequently, dispersion curves could be obtained over a wide frequency band with a range of velocity variations in the order of 100 m/s. Under these conditions, an extremely accurate estimate of the phase velocity as a function of the frequency could be obtained using a Slant Stack transformation. Finally, from these experimental dispersion curves and theoretical dispersion curves, an accurate estimate of the thickness of the layer could be obtained by inversion. This estimated thickness was then confirmed using profilometer measurements.

Generation of broadband surface acoustic waves using a dual temporal-spatial chirp method.

Wideband surface acoustic wave (SAW) generation with a spatial chirp-based interdigital transducer was optimized for non-destructive characterization and testing of coatings and thin layers. The use of impulse temporal excitation (Dirac-type negative pulse) leads to a wide band emitter excitation but with significantly limited SAW output amplitudes due to the piezoelectric crystal breakdown voltage. This limitation can be circumvented by applying a temporal chirp excitation corresponding in terms of frequency band and duration to the spatial chirp transducer configuration. This dual temporal-spatial chirp method was studied in the 20 to 125 MHz frequency range and allowed to obtain higher SAW displacement amplitudes with an excitation voltage lower than that of the impulse excitation.