Broadband soft X-ray source from a clustered gas target dedicated to high-resolution XCT and X-ray absorption spectroscopy.

The development of the broad-bandwidth photon sources emitting in the soft X-ray range has attracted great attention for a long time due to the possible applications in high-resolution spectroscopy, nano-metrology, and material sciences. A high photon flux accompanied by a broad, smooth spectrum is favored for the applications such as near-edge X-ray absorption fine structure (NEXAFS), extended X-ray absorption fine structure (EXAFS), or XUV/X-ray coherence tomography (XCT). So far, either large-scale facilities or technologically challenging systems providing only limited photon flux in a single shot dominate the suitable sources. Here, we present a soft, broad-band (1.5 nm - 10.7 nm) soft X-ray source. The source is based on the interaction of very intense laser pulses with a target formed by a cluster mixture. A photon yield of 2.4 × 1014 photons/pulse into 4π (full space) was achieved with a medium containing Xe clusters of moderate-size mixed with a substantial amount of extremely large ones. It is shown that such a cluster mixture enhances the photon yield in the soft X-ray range by roughly one order of magnitude. The size of the resulting source is not beneficial (≤500 µm but this deficit is compensated by a specific spectral structure of its emission fulfilling the specific needs of the spectroscopic (broad spectrum and high signal dynamics) and metrological applications (broad and smoothed spectrum enabling a sub-nanometer resolution limit for XCT).

Laboratory system for optical coherence tomography (OCT) using a laser plasma source of soft x-rays and extreme ultraviolet and focusing ellipsoidal optics.

Optical coherence tomography (OCT) with the use of soft x-rays (SXR) and extreme ultraviolet (EUV) has been recently demonstrated [Fuchs et al. Sci. Rep.6, 20658 (2016)10.1038/srep20658; Fuchs et al. Optica4, 903 (2017)10.1364/OPTICA.4.000903]. This new imaging technique, named XCT, makes it possible to obtain cross-sectional and tomographic images of objects with nanometer spatial resolution. The article presents a newly developed laboratory system for XCT using a compact laser plasma light source operating in the SXR and EUV spectral ranges. The source is based on a gas puff target containing Kr gas or a Kr/Xe gas mixture irradiated with nanosecond laser pulses from an Nd:YAG laser. The use of the gas puff target enables efficient emission of SXR and EUV radiation without generating target debris associated with laser ablation when using a solid target. The system is equipped with an ellipsoidal mirror to collect radiation from the source and focus on the imaged object. The XCT measurements are made by processing the spectrum of the radiation reflected from the object recorded with a transmission grating spectrometer equipped with an identical focusing mirror and a CCD camera. The paper presents the characterization and optimization of the new XCT system and its application to the measurements of layered nanostructures.

Demonstration of Near Edge X-ray Absorption Fine Structure Spectroscopy of Transition Metals Using Xe/He Double Stream Gas Puff Target Soft X-ray Source.

A near 1-keV photons from the Xe/He plasma produced by the interaction of laser beam with a double stream gas puff target were employed for studies of L absorption edges of period 4 transitional metals with atomic number Z from 26 to 30. The dual-channel, compact NEXAFS system was employed for the acquisition of the absorption spectra. L1-3 absorption edges of the samples were identified in transmission mode using broadband emission from the Xe/He plasma to show the applicability of such source and measurement system to the NEXAFS studies of the transition metals, including magnetic materials.

1-keV emission from laser-plasma source based on an Xe/He double stream gas puff target.

Characterization of Xe emission in the spectral range between 1 and 1.5 keV is presented in the case when the laser-plasma is generated by nanosecond laser pulse irradiation of a double stream Xe/He gas-puff target. Gas target density was estimated using extreme ultraviolet (EUV) radiography. Emission spectral characteristics in the wavelength range from 0.8 to 5.2 nm were determined by using a flat field SXR spectrometer. Significant emission was recorded in two high-energy bands, the first one at wavelengths 0.8-1.6 nm (photon energy range 0.78-1.5 keV) and the second one at 1.6-2.5 nm (0.5-0.78 keV). Both plasma size and photon yield in each band were measured separately to individually assess radiation and source characteristics. Moreover, a proof-of-principle experiment for near-edge X-ray absorption fine structure spectroscopy of metallic sample near the L2,3 absorption edge was performed to show one of the applicability areas of such a compact source.

2-D nanometer thickness mapping applying a reduced bias soft X-ray NEXAFS approach.

We present a 2-D mapping of a sample thickness with nanometer accuracy employing a compact arrangement of near-edge X-ray absorption fine structure (NEXAFS) technique. A NEXAFS spectrum coupled with a scanning system was used to generate a 2-D thickness map of the TiO2 sample (anatase form) deposited on the top of a SiN membrane. The thickness values were retrieved from the experimental data by applying different methods of data processing. In the paper, the detailed analysis of the data processing methods and the identified sources of the errors show that the proposed procedure based on averaging two imperfect estimates reduces the error caused by the uncontrolled bias of the measured signals. This procedure was termed as the average one. The estimates from the proposed average approach and the standard absorption-jump ratio in the absorption edge vicinity were compared with the direct results obtained by applying scanning electron microscopy (SEM). The experimental arrangement of the NEXAFS spectroscopy system, the data acquisition method, as well as the possible error sources, are presented and discussed in detail.

Compact system for near edge X-ray fine structure (NEXAFS) spectroscopy using a laser-plasma light source.

We present a compact laboratory system for near edge soft X-ray fine structure (NEXAFS) spectroscopy that was developed using a laser-plasma light source. The source is based on a double stream gas puff target. The plasma is formed by the interaction of a laser beam with the double stream gas puff target approach. The laser plasma source was optimized for efficient soft X-ray emission from a krypton/helium target in the range of 1.5 to 5 nm wavelength. This emission is used to acquire simultaneously the emission and absorption spectra of soft X-ray light from the source and from the investigated sample using a grazing incidence spectrometer. The measurements in the transmission mode reveal the features near the carbon K-α absorption edge of thin PET film. From those features, the composition of the sample was successfully obtained. The data are in agreement with synchrotron measurements. In the paper, the detailed information about the source, its optimization, the system, spectral measurements and the results are presented and discussed.

A stand-alone compact EUV microscope based on gas-puff target source.

We report on a very compact desk-top transmission extreme ultraviolet (EUV) microscope based on a laser-plasma source with a double stream gas-puff target, capable of acquiring magnified images of objects with a spatial (half-pitch) resolution of sub-50 nm. A multilayer ellipsoidal condenser is used to focus and spectrally narrow the radiation from the plasma, producing a quasi-monochromatic EUV radiation (λ = 13.8 nm) illuminating the object, whereas a Fresnel zone plate objective forms the image. Design details, development, characterization and optimization of the EUV source and the microscope are described and discussed. Test object and other samples were imaged to demonstrate superior resolution compared to visible light microscopy.

Extreme ultraviolet tomography using a compact laser-plasma source for 3D reconstruction of low density objects.

A tomographic method for three-dimensional reconstruction of low density objects is presented and discussed. The experiment was performed in the extreme ultraviolet (EUV) spectral region using a desktop system for enhanced optical contrast and employing a compact laser-plasma EUV source, based on a double stream gas puff target. The system allows for volume reconstruction of transient gaseous objects, in this case gas jets, providing additional information for further characterization and optimization. Experimental details and reconstruction results are shown.