Fresnel zone plate sculptured out of diamond by femtosecond laser for harsh environments.

With the rapid development of micro-optical applications, there is an increasing demand for micro-optical elements that can be made with minimal processing steps. Current research focuses on practical functionalities of optical performance, lightweight, miniaturization, and easy integration. As an important planar diffractive optical element, the Fresnel zone plate (FZP) provides a compact solution for focusing and imaging. However, the fabrication of FZPs with high quality out of hard and brittle materials remains challenging. Here, we report on the fabrication of diamond FZP by femtosecond laser direct writing. FZPs with the same outer diameter and different focal lengths of 250-1000 µm were made via ablation. The fabricated FZPs possess well-defined geometry and excellent focusing and imaging ability in the visible spectral range. Arrays of FZPs with different focal lengths were made for potential applications in imaging, sensing, and integrated optical systems.

Prediction Model for Liquid-Assisted Femtosecond Laser Micro Milling of Quartz without Taper.

The strong nonlinear absorption effect and "cold" processing characteristics of femtosecond lasers make them uniquely advantageous and promising for the micro- and nanoprocessing of hard and brittle materials, such as quartz. Traditional methods for studying the effects of femtosecond laser parameters on the quality of the processed structure mainly use univariate analysis methods, which require large mounts of experiments to predict and achieve the desired experimental results. The method of design of experiments (DOE) provides a way to predict desirable experimental results through smaller experimental scales, shorter experimental periods and lower experimental costs. In this study, a DOE program was designed to investigate the effects of a serious of parameters (laser repetition frequency, pulse energy, scan speed, scan distance, scan mode, scan times and laser focus position) on the depth and roughness (Ra) of the fabricated structure through the liquid-assisted femtosecond laser processing of quartz. A prediction model between the response variables and the main parameters was defined and validated. Finally, several blind holes with a size of 50 × 50 µm2 and a depth of 200 µm were fabricated by the prediction model, which demonstrated the good consistency of the prediction model.

Variable focus convex microlens array on K9 glass substrate based on femtosecond laser processing and hot embossing lithography.

We propose a high-precision method for the fabrication of variable focus convex microlens arrays on K9 glass substrate by combining femtosecond laser direct writing and hot embossing lithography. A sapphire master mold with a blind cylindrical hole array was prepared first by femtosecond laser ablation. The profile control of microlenses dependent on the temperature and the diameter of the blind hole in the sapphire mold was investigated. The curvature radius of the microlens decreased with temperature and increased with diameter. Uniform convex microlens arrays were fabricated with good imaging performance. Further, variable focus convex microlens arrays were fabricated by changing the diameter of the blind hole in sapphire, which produced the image at variable z planes. This method provides a highly precise fabrication of convex microlens arrays and is well suited for batch production of micro-optical elements.

Optimized holographic femtosecond laser patterning method towards rapid integration of high-quality functional devices in microchannels.

Rapid integration of high-quality functional devices in microchannels is in highly demand for miniature lab-on-a-chip applications. This paper demonstrates the embellishment of existing microfluidic devices with integrated micropatterns via femtosecond laser MRAF-based holographic patterning (MHP) microfabrication, which proves two-photon polymerization (TPP) based on spatial light modulator (SLM) to be a rapid and powerful technology for chip functionalization. Optimized mixed region amplitude freedom (MRAF) algorithm has been used to generate high-quality shaped focus field. Base on the optimized parameters, a single-exposure approach is developed to fabricate 200 × 200 µm microstructure arrays in less than 240 ms. Moreover, microtraps, QR code and letters are integrated into a microdevice by the advanced method for particles capture and device identification. These results indicate that such a holographic laser embellishment of microfluidic devices is simple, flexible and easy to access, which has great potential in lab-on-a-chip applications of biological culture, chemical analyses and optofluidic devices.