Reduction of surface charging effects in laser ablation ionisation mass spectrometry through gold coating.

In femtosecond Laser Ablation Ionisation Mass Spectrometry (fs-LIMS) short laser pulses are used to ablate, atomise, and ionise solid sample material shot-by-shot. When ablating non-conductive samples electric charging of the surface can occur. Depending on the geometry of the instrument, the surface charge can influence the spread of the ablation plume and reduce spectral quality. Methods to reduce surface charging were investigated using a non-conductive geological sample and a miniature fs-LIMS system with a co-linear ablation geometry. Pausing five seconds between consecutive laser bursts fired on non-coated material improved the spectral quality by giving surface charges more time to dissipate. However, best mass spectrometric results were achieved after the sample was sputter coated with a thin gold layer, as a conductive sample surface hinders charge build-up. Consequently, gold coating allowed operation of the laser system at much higher laser pulse energies improving sensitivity and reliability. It also removed the need to pause between laser bursts, speeding up the measurement acquisition.

Quantitative laser-matter interaction: a 3D study of UV-fs-laser ablation on single crystalline Ru(0001).

Laser ablation is nowadays an extensively applied technology to probe the chemical composition of solid materials. It allows for precise targeting of micrometer objects on and in samples, and enables chemical depth profiling with nanometer resolution. An in-depth understanding of the 3D geometry of the ablation craters is crucial for precise calibration of the depth scale in chemical depth profiles. Herein we present a comprehensive study on laser ablation processes using a Gaussian-shaped UV-femtosecond irradiation source and present how the combination of three different imaging methods (scanning electron microscopy, interferometric microscopy, and X-ray computed tomography) can provide accurate information on the crater's shapes. Crater analysis by applying X-ray computed tomography is of considerable interest because it allows the imaging of an array of craters in one step with sub-µm accuracy and is not limited to the aspect ratio of the crater. X-ray computed tomography thereby complements the analysis of laser ablation craters. The study investigates the effect of laser pulse energy and laser burst count on a single crystal Ru(0001) sample. Single crystals ensure that there is no dependence on the grain orientations during the laser ablation process. An array of 156 craters of different dimensions ranging from <20 nm to ∼40 µm in depth were created. For each individually applied laser pulse, we measured the number of ions generated in the ablation plume with our laser ablation ionization mass spectrometer. We show to which extent the combination of these four techniques reveals valuable information on the ablation threshold, the ablation rate, and the limiting ablation depth. The latter is expected to be a consequence of decreasing irradiance upon increasing crater surface area. The ion signal generated was found to be proportional to the volume ablated up to the certain depth, which enables in-situ depth calibration during the measurement.

Calibrating beam fluxes of a low-energy neutral atom beam facility.

Scientific detection and imaging instruments for low-energetic neutral atoms (ENA) onboard spacecraft require thorough pre-flight laboratory calibration against a well-characterized neutral atom beam source. To achieve this requirement, a dedicated test facility is available at the University of Bern, which is equipped with a powerful plasma ion source and an ion beam neutralization stage. Using surface neutralization, low-energy neutral atom beams of any desired gas species can be produced in the energy range from 3 keV down as low as 10 eV. As the efficiency of the neutralization stage is species and energy dependent, the neutralizer itself needs to be calibrated against an independent reference. We report on the calibration and characterization of this neutral atom beam source using our recently developed Absolute Beam Monitor (ABM) as a primary calibration standard. The ABM measures the absolute ENA flux independent of neutral species in the energy range from 10 eV to 3 keV. We obtain calibration factors of a few 100 cm-2 s-1 pA-1, depending on species at beam energies above about 100 eV, and a power-law decrease for energies below 100 eV. Furthermore, the energy loss of neutralized ions in the surface neutralizer is estimated from time-of-flight measurements using the ABM. The relative energy loss increases with ENA energy from low levels near zero up to 20%-35% at 3 keV, depending on atomic species. Having calibrated our neutral beam source allows for accurate calibration of ENA space instruments.

Absolute beam monitor: A novel laboratory device for neutral beam calibration.

Instruments recording Energetic Neutral Atoms (ENAs) for space applications require thorough laboratory calibration in a dedicated test facility providing a neutral atom beam. Accurate knowledge of the neutral beam intensity and energy is central for the laboratory calibration procedure. However, until recently, the quantification of the neutral atom beam intensity in the low-energy range below a few 100 eV was based on relative measurements with standard detectors of approximately known detection efficiencies for neutral atoms. We report on the design and development of a novel calibration device dedicated to determining the ENA beam flux in an absolute manner in the energy range from 3 keV down to about 10 eV. This is realized by applying ENA scattering at a surface and coincident detection of scattered particles and created secondary electrons. Moreover, the neutral beam energy is determined by a time-of-flight measurement. The applied measurement principle relies on very low background signals. The observed background count rates are in the range 10-2 s for the individual channels and about 10-5 s for coincidence events. The background is, thus, at least two, typically four, orders of magnitude lower than the signal rate for neutral atom beams in the foreseen energy range. We demonstrate a concrete application using the absolute flux calibration of a laboratory neutralization stage.

Automated, 3-D and Sub-Micron Accurate Ablation-Volume Determination by Inverse Molding and X-Ray Computed Tomography.

Ablation of materials in combination with element-specific analysis of the matter released is a widely used method to accurately determine a material's chemical composition. Among other methods, repetitive ablation using femto-second pulsed laser systems provides excellent spatial resolution through its incremental removal of nanometer thick layers. The method can be combined with high-resolution mass spectrometry, for example, laser ablation ionization mass spectrometry, to simultaneously analyze chemically the material released. With increasing depth of the volume ablated, however, secondary effects start to play an important role and the ablation geometry deviates substantially from the desired cylindrical shape. Consequently, primarily conical but sometimes even more complex, rather than cylindrical, craters are created. Their dimensions need to be analyzed to enable a direct correlation with the element-specific analytical signals. Here, a post-ablation analysis method is presented that combines generic polydimethylsiloxane-based molding of craters with the volumetric reconstruction of the crater's inverse using X-ray computed tomography. Automated analysis yields the full, sub-micron accurate anatomy of the craters, thereby a scalable and generic method to better understand the fundamentals underlying ablation processes applicable to a wide range of materials. Furthermore, it may serve toward a more accurate determination of heterogeneous material's composition for a variety of applications without requiring time- and labor-intensive analyses of individual craters.

Multiwavelength Ablation/Ionization and Mass Spectrometric Analysis of 1.88 Ga Gunflint Chert.

The investigation of chemical composition on planetary bodies without significant sample processing is of importance for nearly every mission aimed at robotic exploration. Moreover, it is a necessary tool to achieve the longstanding goal of finding evidence of life beyond Earth, for example, possibly preserved microbial remains within martian sediments. Our Laser Ablation Ionization Mass Spectrometer (LIMS) is a compact time-of-flight mass spectrometer intended to investigate the elemental, isotope, and molecular composition of a wide range of solid samples, including e.g., low bulk density organic remains in microfossils. Here, we present an overview of the instrument and collected chemical spectrometric data at the micrometer level from a Precambrian chert sample (1.88 Ga Gunflint Formation, Ontario, Canada), which is considered to be a martian analogue. Data were collected from two distinct zones-a silicified host area and a carbon-bearing microfossil assemblage zone. We performed these measurements using an ultrafast pulsed laser system (pulse width of ∼180 fs) with multiple wavelengths (infrared [IR]-775 nm, ultraviolet [UV]-387 nm, UV-258 nm) and using a pulsed high voltage on the mass spectrometer to reveal small organic signals. We investigated (1) the chemical composition of the sample and (2) the different laser wavelengths' performance to provide chemical depth profiles in silicified media. Our key findings are as follows: (1) microfossils from the Gunflint chert reveal a distinct chemical composition compared with the host mineralogy (we report the identification of 24 elements in the microfossils); (2) detection of the pristine composition of microfossils and co-occurring fine chemistry (rare earth elements) requires utilization of the depth profiling measurement protocol; and (3) our results show that, for analysis of heterogeneous material from siliciclastic deposits, siliceous sinters, and cherts, the most suitable wavelength for laser ablation/Ionization is UV-258 nm.

On Topological Analysis of fs-LIMS Data. Implications for in Situ Planetary Mass Spectrometry.

In this contribution, we present results of non-linear dimensionality reduction and classification of the fs laser ablation ionization mass spectrometry (LIMS) imaging dataset acquired from the Precambrian Gunflint chert (1.88 Ga) using a miniature time-of-flight mass spectrometer developed for in situ space applications. We discuss the data generation, processing, and analysis pipeline for the classification of the recorded fs-LIMS mass spectra. Further, we define topological biosignatures identified for Precambrian Gunflint microfossils by projecting the recorded fs-LIMS intensity space into low dimensions. Two distinct subtypes of microfossil-related spectra, a layer of organic contamination and inorganic quartz matrix were identified using the fs-LIMS data. The topological analysis applied to the fs-LIMS data allows to gain additional knowledge from large datasets, formulate hypotheses and quickly generate insights from spectral data. Our contribution illustrates the utility of applying spatially resolved mass spectrometry in combination with topology-based analytics in detecting signatures of early (primitive) life. Our results indicate that fs-LIMS, in combination with topological methods, provides a powerful analytical framework and could be applied to the study of other complex mineralogical samples.

Improved plasma stoichiometry recorded by laser ablation ionization mass spectrometry using a double-pulse femtosecond laser ablation ion source.

RATIONALE: Femtosecond (fs) laser ablation ion sources have allowed for improved measurement capabilities and figures of merit of laser ablation based spectroscopic and mass spectrometric measurement techniques. However, in comparison to longer pulse laser systems, the ablation plume from fs lasers is observed to be colder, which favors the formation of polyatomic species. Such species can limit the analytical capabilities of a system due to isobaric interferences. In this contribution, a double-pulse femtosecond (DP-fs) laser ablation ion source is coupled to our miniature Laser Ablation Ionization Mass Spectrometry (LIMS) system and its impact on the recorded stoichiometry of the generated plasma is analyzed in detail. METHODS: A DP-fs laser ablation ion source (temporal delays of +300 to - 300 ps between pulses) is connected to our miniature LIMS system. The first pulse is used for material removal from the sample surface and the second for post-ionization of the ablation plume. To characterize the performance, parametric double- and single-pulse studies (temporal delays, variation of the pulse energy, voltage applied on detector system) were conducted on three different NIST SRM alloy samples (SRM 661, 664 and 665). RESULTS: At optimal instrument settings for both the double-pulse laser ablation ion source and the detector voltage, relative sensitivity coefficients were observed to be closer (factor of ~2) to 1 compared with single-pulse measurements. Furthermore, the optimized settings worked for all three samples, meaning no further optimization was necessary when changing to another alloy sample material during this study. CONCLUSIONS: The application of a double-pulse femtosecond laser ablation ion source resulted in the recording of improved stoichiometry of the generated plasma using our LIMS measurement technique. This is of great importance for the quantitative chemical analysis of more complex solid materials, e.g., geological samples or metal alloys, especially when aiming for standard-free quantification procedures for the determination of the chemical composition.

Isotope abundance ratio measurements using femtosecond laser ablation ionization mass spectrometry.

Accurate isotope ratio measurements are of high importance in various scientific fields, ranging from radio isotope geochronology of solids to studies of element isotopes fractionated by living organisms. Instrument limitations, such as unresolved isobaric inferences in the mass spectra, or cosampling of the material of interest together with the matrix material may reduce the quality of isotope measurements. Here, we describe a method for accurate isotope ratio measurements using our laser ablation ionization time-of-flight mass spectrometer (LIMS) that is designed for in situ planetary research. The method is based on chemical depth profiling that allows for identifying micrometer scale inclusions embedded in surrounding rocks with different composition inside the bulk of the sample. The data used for precise isotope measurements are improved using a spectrum cleaning procedure that ensures removal of low quality spectra. Furthermore, correlation of isotopes of an element is used to identify and reject the data points that, for example, do not belong to the species of interest. The measurements were conducted using IR femtosecond laser irradiation focused on the sample surface to a spot size of ~12 µm. Material removal was conducted for a predefined number of laser shots, and time-of-flight mass spectra were recorded for each of the ablated layers. Measurements were conducted on NIST SRM 986 Ni isotope standard, trevorite mineral, and micrometer-sized inclusions embedded in aragonite. Our measurements demonstrate that element isotope ratios can be measured with accuracies and precision at the permille level, exemplified by the analysis of B, Mg, and Ni element isotopes. The method applied will be used for in situ investigation of samples on planetary surfaces, for accurate quantification of element fractionation induced by, for example, past or present life or by geochemical processes.

The Detection of Elemental Signatures of Microbes in Martian Mudstone Analogs Using High Spatial Resolution Laser Ablation Ionization Mass Spectrometry.

The detection and identification of biosignatures on planetary bodies such as Mars in situ is extremely challenging. Current knowledge from space exploration missions suggests that a suite of complementary instruments is required in situ for a successful identification of past or present life. For future exploration missions, new and innovative instrumentation capable of high spatial resolution chemical (elemental and isotope) analysis of solids with improved measurement capabilities is of considerable interest because a multitude of potential signatures of extinct or extant life have dimensions on the micrometer scale. The aim of this study is to extend the current measurement capabilities of a miniature laser ablation ionization mass spectrometer (LIMS) designed for space exploration missions to detect signatures of microbial life. In total, 14 martian mudstone analogue samples were investigated regarding their elemental composition. Half the samples were artificially inoculated with a low number density of microbes, and half were used as abiotic controls. The samples were treated in a number of ways. Some were cultured anaerobically and some aerobically; some abiotic samples were incubated with water, and some remained dry. Some of the samples were exposed to a large dose of γ radiation, and some were left un-irradiated. While no significant elemental differences were observed between the applied sample treatments, the instrument showed the capability to detect biogenic element signatures of the inoculated microbes by monitoring biologically relevant elements, such as hydrogen, carbon, sulfur, iron, and so on. When an enrichment in carbon was measured in the samples but no simultaneous increase in other biologically relevant elements was detected, it suggests, for example, a carbon-containing inclusion; when the enrichment was in carbon and in bio-relevant elements, it suggests the presences of microbes. This study presents first results on the detection of biogenic element patterns of microbial life using a miniature LIMS system designed for space exploration missions.

ORIGIN: a novel and compact Laser Desorption - Mass Spectrometry system for sensitive in situ detection of amino acids on extraterrestrial surfaces.

For the last four decades space exploration missions have searched for molecular life on planetary surfaces beyond Earth. Often pyrolysis gas chromatography mass spectrometry has been used as payload on such space exploration missions. These instruments have relatively low detection sensitivity and their measurements are often undermined by the presence of chloride salts and minerals. Currently, ocean worlds in the outer Solar System, such as the icy moons Europa and Enceladus, represent potentially habitable environments and are therefore prime targets for the search for biosignatures. For future space exploration missions, novel measurement concepts, capable of detecting low concentrations of biomolecules with significantly improved sensitivity and specificity are required. Here we report on a novel analytical technique for the detection of extremely low concentrations of amino acids using ORIGIN, a compact and lightweight laser desorption ionization - mass spectrometer designed and developed for in situ space exploration missions. The identified unique mass fragmentation patterns of amino acids coupled to a multi-position laser scan, allows for a robust identification and quantification of amino acids. With a detection limit of a few fmol mm-2, and the possibility for sub-fmol detection sensitivity, this measurement technique excels current space exploration systems by three orders of magnitude. Moreover, our detection method is not affected by chemical alterations through surface minerals and/or salts, such as NaCl that is expected to be present at the percent level on ocean worlds. Our results demonstrate that ORIGIN is a promising instrument for the detection of signatures of life and ready for upcoming space missions, such as the Europa Lander.

UV post-ionization laser ablation ionization mass spectrometry for improved nm-depth profiling resolution on Cr/Ni reference standard.

RATIONALE: Laser ablation combined with mass spectrometry forms a promising tool for chemical depth profiling of solids. At irradiations near the ablation threshold, high depth resolutions are achieved. However, at these conditions, a large fraction of ablated species is neutral and therefore invisible to the instrument. To compensate for this effect, an additional ionization step can be introduced. METHODS: Double-pulse laser ablation is frequently used in material sciences to produce shallow craters. We apply double-pulse UV femtosecond (fs) Laser Ablation Ionization Mass Spectrometry to investigate the depth profiling performance. The first pulse energy is set to gentle ablation conditions, whereas the second pulse is applied at a delay and a pulse energy promoting the highest possible ion yield. RESULTS: The experiments were performed on a Cr/Ni multi-layered standard. For a mean ablation rate of ~3 nm/pulse (~72 nJ/pulse), a delay of ~73 ps provided optimal results. By further increasing the energy of the second pulse (5-30% higher with respect to the first pulse) an enhancement of up to 15 times the single pulse intensity was achieved. These conditions resulted in mean depth resolutions of ~37 and ~30 nm for the Cr and Ni layers, respectively. CONCLUSIONS: It is demonstrated on the thin-film standard that the double-pulse excitation scheme substantially enhances the chemical depth profiling resolution of LIMS with respect to the single-pulse scheme. The post-ionization allows for extraordinarily low ablation rates and for quantitative and stoichiometric analysis of nm-thick films/coatings.

Performance of a Low Energy Ion Source with Carbon Nanotube Electron Emitters under the Influence of Various Operating Gases.

Low energy ion measurements in the vicinity of a comet have provided us with important information about the planet's evolution. The calibration of instruments for thermal ions in the laboratory plays a crucial role when analysing data from in-situ measurements in space. A new low energy ion source based on carbon nanotube electron emitters was developed for calibrating the ion-mode of mass spectrometers or other ion detectors. The electron field emission (FE) properties of carbon nanotubes (CNTs) for H2, He, Ar, O2, and CO2 gases were tested in the experiments. H2, He, Ar, and CO2 adsorbates could change the FE temporarily at pressures from10-6 Pa to10-4 Pa. The FE of CNT remains stable in Ar and increases in H2, but degrades in He, O2, and CO2. All gas adsorbates lead to temporary degradation after working for prolonged periods. The ion current of the ion source is measured by using a Faraday cup and the sensitivity is derived from this measurement. The ion currents for the different gases were around 10 pA (corresponding to 200 ions/cm3 s) and an energy of ~28 eV could be observed.

Residual Gas Adsorption and Desorption in the Field Emission of Titanium-Coated Carbon Nanotubes.

Titanium (Ti)-coated multiwall carbon nanotubes (CNTs) emitters based on the magnetron sputtering process are demonstrated, and the influences of modification to CNTs on the residual gas adsorption, gas desorption, and their field emission characteristic are discussed. Experimental results show that Ti nanoparticles are easily adsorbed on the surface of CNTs due to the "defects" produced by Ar+ irradiation pretreatment. X-ray photoelectron spectroscopy (XPS) characterization showed that Ti nanoparticles contribute to the adsorption of ambient molecules by changing the chemical bonding between C, Ti, and O. Field emission of CNTs coated with Ti nanoparticles agree well with the Fowler-Nordheim theory. The deviation of emission current under constant voltage is 6.3% and 8.6% for Ti-CNTs and pristine CNTs, respectively. The mass spectrometry analysis illustrated that Ti-coated CNTs have a better adsorption capacity at room temperature, as well as a lower outgassing effect than pristine CNTs after degassing in the process of field emission.

Detectability of biosignatures in a low-biomass simulation of martian sediments.

Discovery of a remnant habitable environment by the Mars Science Laboratory in the sedimentary record of Gale Crater has reinvigorated the search for evidence of martian life. In this study, we used a simulated martian mudstone material, based on data from Gale Crater, that was inoculated and cultured over several months and then dried and pressed. The simulated mudstone was analysed with a range of techniques to investigate the detectability of biosignatures. Cell counting and DNA extraction showed a diverse but low biomass microbial community that was highly dispersed. Pellets were analysed with bulk Elemental Analysis - Isotope Ratio Mass Spectrometry (EA-IRMS), high-resolution Laser-ablation Ionisation Mass Spectrometry (LIMS), Raman spectroscopy and Fourier Transform InfraRed (FTIR) spectroscopy, which are all techniques of relevance to current and future space missions. Bulk analytical techniques were unable to differentiate between inoculated samples and abiotic controls, despite total levels of organic carbon comparable with that of the martian surface. Raman spectroscopy, FTIR spectroscopy and LIMS, which are high sensitivity techniques that provide chemical information at high spatial resolution, retrieved presumptive biosignatures but these remained ambiguous and the sedimentary matrix presented challenges for all techniques. This suggests challenges for detecting definitive evidence for life, both in the simulated lacustrine environment via standard microbiological techniques and in the simulated mudstone via analytical techniques with relevance to robotic missions. Our study suggests that multiple co-incident high-sensitivity techniques that can scan the same micrometre-scale spots are required to unambiguously detect biosignatures, but the spatial coverage of these techniques needs to be high enough not to miss individual cellular-scale structures in the matrix.

EGT-A sensitive time-of-flight mass spectrometer for multielement isotope gas analysis.

The principles of operation and figures of merit of a novel, compact (324 mm × Ø 114 mm; volume approximately 1000 cm3 ) reflectron-type time-of-flight mass spectrometer designed for simultaneous multielement isotope gas analysis is presented. The system, which consists of a pulsed electron impact ion source, is designed either to directly analyse gas samples collected and stored in a compartment or samples extracted from solids using a CW laser system (fibre-coupled diode laser, <75 W, λ = 808 ± 10 nm). In latter case, laser pulses are focussed onto the sample surface to spot sizes of approximately 400 µm in diameter that allows for direct ablation and vaporisation of solid sample material and releasing of trapped gases. A cleaning and trapping system that consists of various cold stages and getters is used before the gas enters the mass analyser. Measurements on various gases were conducted for performance evaluation, ranging from standard gases (Ar, Kr, and Xe) to trapped gases extracted from a sample of the Millbillillie meteorite. At optimised instrument settings, mass spectrometric measurements can be conducted with a mass resolution m/∆m of up to approximately 1200 (16 O and CH4 can be resolved), with a dynamic range of approximately 6 orders of magnitude and a mass calibration accuracy of approximately 100 ppm. The high detection sensitivity of the system allows the detection of gas species at partial pressures down to the low 10-16  mbar level (corresponding to <10 particles/cm3 at standard temperature and pressure, including an ion transmission of approximately 80%). Measurements using standard gases demonstrated that the isotope ratios for a given element can be measured with an accuracy at the per mill level (relative to terrestrial values). Measurements of Ar extracted from the meteorite Millbillillie gave a 36 Ar/38 Ar ratio of approximately 1.6, which is in good agreement with literature values.

Chemical and Optical Identification of Micrometer-Sized 1.9 Billion-Year-Old Fossils by Combining a Miniature Laser Ablation Ionization Mass Spectrometry System with an Optical Microscope.

The recognition of biosignatures on planetary bodies requires the analysis of the putative microfossil with a set of complementary analytical techniques. This includes localized elemental and isotopic analysis of both, the putative microfossil and its surrounding host matrix. If the analysis can be performed with spatial resolution at the micrometer level and ppm detection sensitivities, valuable information on the (bio)chemical and physical processes that influenced the sample material can be gained. Our miniaturized laser ablation ionization mass spectrometry (LIMS)-time-of-flight mass spectrometer instrument is a valid candidate for performing the required chemical analysis in situ. However, up until now it was limited by the spatial accuracy of the sampling. In this contribution, we introduce a newly developed microscope system with micrometer accuracy for Ultra High Vacuum application, which allows a significant increase in the measurement capabilities of our miniature LIMS system. The new enhancement allows identification and efficient and accurate sampling of features of micrometer-sized fossils in a host matrix. The performance of our system is demonstrated by the identification and chemical analysis of signatures of micrometer-sized fossil structures in the 1.9 billion-year-old Gunflint chert.

Krypton isotopes and noble gas abundances in the coma of comet 67P/Churyumov-Gerasimenko.

The Rosetta Orbiter Spectrometer for Ion and Neutral Analysis mass spectrometer Double Focusing Mass Spectrometer on board the European Space Agency's Rosetta spacecraft detected the major isotopes of the noble gases argon, krypton, and xenon in the coma of comet 67P/Churyumov-Gerasimenko. Earlier, it was found that xenon exhibits an isotopic composition distinct from anywhere else in the solar system. However, argon isotopes, within error, were shown to be consistent with solar isotope abundances. This discrepancy suggested an additional exotic component of xenon in comet 67P/Churyumov-Gerasimenko. We show that krypton also exhibits an isotopic composition close to solar. Furthermore, we found the argon to krypton and the krypton to xenon ratios in the comet to be lower than solar, which is a necessity to postulate an addition of exotic xenon in the comet.

Insights into Laser Ablation Processes of Heterogeneous Samples: Toward Analysis of Through-Silicon-Vias.

State-of-the-art three-dimensional very large-scale integration (3D-VLSI) relies, among other factors, on the purity of high-aspect-ratio Cu interconnects such as through-silicon-vias (TSVs). Accurate spatial chemical analysis of electroplated TSV structures has been proven to be challenging due to their large aspect ratios and their multimaterial composition (Cu and Si) with distinct physical properties. Here, we demonstrate that these structures can be accurately analyzed by femtosecond (fs) laser beam ablation techniques in combination with ionization mass spectrometry (LIMS). We specifically report on novel preparation approaches for the postablation analysis of craters formed upon TSV depth profiling. The novel TSV sample preparation is based on deep and material-selective reactive-ion etching of the Si matrix surrounding the Cu interconnects thus facilitating systematic focused-ion-beam (FIB) investigations of the high-aspect-ratio TSV structures upon ablation. The particular structure of the TSV analyte combined with the ⌀beam > ⌀Cu-TSV condition allowed for an in-depth investigation of fundamental laser ablation processes, particularly focusing on the redeposition of ablated material at the inner side-walls of the LIMS craters. This phenomenon is of imminent importance for the ultimate quantification in any laser ablation-based depth profiling. In addition, we have developed a new method which allows the unambiguous determination of the crossing-point of the Si/Cu||bare Si interface upon Cu-TSV depth profiling which is based on pronounced, depth-dependent changes in the mass-spectrometric detection of those Si xy+ species formed upon the LIMS depth erosion.