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1.
Micromachines (Basel) ; 14(7)2023 Jun 28.
Artigo em Inglês | MEDLINE | ID: mdl-37512637

RESUMO

Optical tweezers (OTs) can transfer light momentum to particles, achieving the precise manipulation of particles through optical forces. Due to the properties of non-contact and precise control, OTs have provided a gateway for exploring the mysteries behind nonlinear optics, soft-condensed-matter physics, molecular biology, and analytical chemistry. In recent years, OTs have been combined with microfluidic chips to overcome their limitations in, for instance, speed and efficiency, creating a technology known as "optofluidic tweezers." This paper describes static OTs briefly first. Next, we overview recent developments in optofluidic tweezers, summarizing advancements in capture, manipulation, sorting, and measurement based on different technologies. The focus is on various kinds of optofluidic tweezers, such as holographic optical tweezers, photonic-crystal optical tweezers, and waveguide optical tweezers. Moreover, there is a continuing trend of combining optofluidic tweezers with other techniques to achieve greater functionality, such as antigen-antibody interactions and Raman tweezers. We conclude by summarizing the main challenges and future directions in this research field.

2.
Micromachines (Basel) ; 14(3)2023 Mar 22.
Artigo em Inglês | MEDLINE | ID: mdl-36985109

RESUMO

To explore the versatility of speakers, a piezoelectric micro-electro-mechanical system (MEMS) speaker combining the function of a silent alarm is proposed, which mainly comprises a lead zirconate titanate (PZT) actuation layer and a rigid-flexible coupling supporting layer. Measurements performed on encapsulated prototypes mounted to an artificial ear simulator have revealed that, compared to a speaker with a rigid supporting layer, the sound pressure level (SPL) of the proposed piezoelectric MEMS speaker with a rigid-flexible coupling supporting layer is significantly higher and is especially higher by 4.1-20.1 dB in the frequency range from 20 Hz to 4.2 kHz, indicating that the rigid-flexible coupling supporting layer can improve the SPL significantly in low frequency. Moreover, the spectral distribution characteristic of its playback audio is similar to that of the commercial electromagnetic type. The device can also function as a silent alarm based on oral airflows in dangerous situations, as it performs well at recognizing words according to their unique voltage-signal characteristics, and can avoid the effects of external sound noise, body movement, long distance, and occlusion. This strategy provides inspiration for functional diversification of piezoelectric MEMS speakers.

3.
Opt Lett ; 48(4): 924-927, 2023 Feb 15.
Artigo em Inglês | MEDLINE | ID: mdl-36790976

RESUMO

In this paper, we research the temperature stability of silicon-based ring resonator thermometers utilizing the Pound-Drever-Hall (PDH) technique. A slight temperature fluctuation of 12.2 mK in 200 s was experimentally detected by immersing the sensor in the triple point of water (TPW) system with ultrahigh precision. Additionally, factors that affect temperature stability, including fundamental thermal noise, laser frequency drift, and power fluctuation were analyzed and calculated theoretically. This shows high consistency with experimental results. Moreover, it is proved that the laser drift can be suppressed from 11.3 pm to 0.013 pm with the developed experimental system based on the PDH technique. The silicon-based ring resonator as a potential platform for precise temperature monitoring is proved based on this work.

4.
Opt Lett ; 44(21): 5322-5325, 2019 Nov 01.
Artigo em Inglês | MEDLINE | ID: mdl-31674998

RESUMO

In this Letter, a novel humidity sensor based on a chip-scale silicon nanobeam cavity with polymethyl methacrylate (PMMA) cladding is demonstrated. This sensor is easy to fabricate and compatible with CMOS technology. It shows a humidity sensing with a linear wavelength dependence of 22.9 pm/% relative humidity (RH) in a wide range of RH from 10% to 85%, an ultra-fast response time of 540 ms, and high stability. After annealing, the sensor exhibits high reversibility, repeatability, and temperature insensitivity at the range of 25°C-40°C. To the best of our knowledge, this is the first application of integrated photonics in high performance humidity detection. It provides a new way for the chip-scale sensor to integrate with photonic devices and optical systems.

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