Heterogeneous micro-architectonic integration of SU-8 and highly entangled polyacrylamide hydrogel to realize cut-resistant soft superhydrophobic surfaces.

This paper presents a novel idea to create cut-resistant superhydrophobic (SHPo) surfaces by integrating an array of SU-8 micropillars on a highly entangled polyacrylamide (PAAm) hydrogel substrate. We begin by demonstrating that this highly entangled PAAm hydrogel exhibits superior resistance to cutting while being as transparent, flexible, and stretchable as other polymeric substrates like polydimethylsiloxane (PDMS). Currently, there are no well-known methods or chemicals to directly integrate SU-8 and PAAm with a covalent bond. To overcome this challenge, we introduce a thin layer of chemically modified PDMS between the SU-8 and PAAm so that covalent bonds can be formed between both the SU-8/PDMS interface and the PDMS/PAAm interface. After validating the reliability of the bonding in our experiments, we develop a heterogeneous integration process to fabricate the desired SHPo surface. To demonstrate the critical role of PAAm hydrogel in achieving the cut-resistant SHPo surface, we contrast this new SHPo surface with a reference version that uses a PDMS substrate instead. We conduct microscopic inspections using scanning electron microscopy (SEM) and a contact angle goniometer before and after cutting the two surfaces. These evaluations show significant differences in their structural integrity and behavior in water interaction.

A Novel Device for Micro-Droplets Generation Based on the Stepwise Membrane Emulsification Principle.

This paper presents a novel design of the device to generate microspheres or micro-droplets based on the membrane emulsification principle. Specifically, the novelty of the device lies in a proposed two-layer or stepwise (by generalization) membrane structure. An important benefit of the stepwise membrane is that it can be fabricated with the low-cost material (SU-8) and using the conventional lithography technology along with a conventional image-based alignment technique. The experiment to examine the effectiveness of the proposed membrane was conducted, and the result shows that microspheres with the size of 2.3 µm and with the size uniformity of 0.8 µm can be achieved, which meets the requirements for most applications in industries. It is noted that the traditional membrane emulsification method can only produce microspheres of around 20 µm. The main contribution of this paper is thus the new design principle of membranes (i.e., stepwise structure), which can be made by the cost-effective fabrication technique, for high performance of droplets production.

Theoretical and Experimental Analysis of Single-Arm Bimodal Plasmo-Photonic Refractive Index Sensors.

In this paper, we study both theoretically and experimentally the sensitivity of bimodal interferometric sensors where interference occurs between two plasmonic modes with different properties propagating in the same physical waveguide. In contrast to the well-known Mach-Zehnder interferometric (MZI) sensor, we show for the first time that the sensitivity of the bimodal sensor is independent of the sensing area length. This is validated by applying the theory to an integrated plasmo-photonic bimodal sensor that comprises an aluminum (Al) plasmonic stripe waveguide co-integrated between two accessible SU-8 photonic waveguides. A series of such bimodal sensors utilizing plasmonic stripes of different lengths were numerically simulated, demonstrating bulk refractive index (RI) sensitivities around 5700 nm/RIU for all sensor variants, confirming the theoretical results. The theoretical and numerical results were also validated experimentally through chip-level RI sensing experiments on three fabricated SU-8/Al bimodal sensors with plasmonic sensing lengths of 50, 75, and 100 µm. The obtained experimental RI sensitivities were found to be very close and equal to 4464, 4386, and 4362 nm/RIU, respectively, confirming that the sensing length has no effect on the bimodal sensor sensitivity. The above outcome alleviates the design and optical loss constraints, paving the way for more compact and powerful sensors that can achieve high sensitivity values at ultra-short sensing lengths.

Enhancing Manufacturability of SU-8 Piezoelectric Composite Films for Microsystem Applications.

Piezoelectric thin films are extensively used as sensing or actuating layers in various micro-electromechanical systems (MEMS) applications. However, most piezoelectrics are stiff ceramics, and current polymer piezoelectrics are not compatible with microfabrication due to their low Curie Temperature. Recent polymer-composite piezoelectrics have gained interest but can be difficult to pattern. Photodefinable piezoelectric films could resolve these challenges by reducing the manufacturability steps by eliminating the etching process. But they typically have poor resolution and thickness properties. This study explores methods of enhancing the manufacturability of piezoelectric composite films by optimizing the process parameters and synthesis of SU-8 piezo-composite materials. Piezoelectric ceramic powders (barium titanate (BTO) and lead zirconate titanate (PZT)) were integrated into SU-8, a negative epoxy-based photoresist, to produce high-resolution composites in a non-cleanroom environment. I-line (365 nm) light was used to enhance resolution compared to broadband lithography. Two variations of SU-8 were prepared by thinning down SU-8 3050 and SU-8 3005. Different weight percentages of the piezoelectric powders were investigated: 5, 10, 15 and 20 wt.% along with varied photolithography processing parameters. The composites' transmittance properties were characterized using UV-Vis spectroscopy and the films' crystallinity was determined using X-ray diffraction (XRD). The 0-3 SU-8/piezo composites demonstrated resolutions < 2 µm while maintaining bulk piezoelectric coefficients d33 > 5 pm V-1. The films were developed with thicknesses >10 µm. Stacked layers were achieved and demonstrated significantly higher d33 properties.

Fabrication of SU-8 polymer micro/nanoscale nozzle by hot embossing method.

Electrohydrodynamic-jet printing (E-jet printing) is a direct-writing technology for manufacturing micro-nano devices. To further reduce the inner diameter of the nozzle to improve the printing resolution, a large-scale manufacturing method of SU-8 polymer micro/nanoscale nozzle by means of a process combining UV exposure and hot embossing was proposed. To improve the adhesive strength between the UV mask and SU-8, the influence of the oxygen plasma treatment parameters on the water contact angles of the UV mask was analyzed. The effect of hot embossing time and temperature on the replication precision was studied. The influence of UV exposure parameters and thermal bonding parameters on the micro and nanochannel pattern was investigated. The SU-8 polymer nozzles with 188 ± 3 nm wide and 104 ± 2 nm deep nanochannels were successfully fabricated, and the replication precision can reach to 98.5%. The proposed manufacturing method of SU-8 polymer nozzles in this study will significantly advance the research on the transport properties of nanoscale channels in E-jet nozzles and facilitate further advancements in E-jet based applications.

Fabrication Method for Shape-Controlled 3D Tissue Using High-Porosity Porous Structure.

Shape-controlled 3D tissues resemble natural living tissues in human and animal bodies and are essential materials for developing and improving technologies in regenerative medicine, drug discovery, and biological robotics. In previous studies, shape-controlled 3D tissues were fabricated using scaffold structures or 3D bioprinting techniques. However, controlling the shape of 3D tissues without leaving non-natural materials inside the 3D tissue and efficiently fabricating them remains challenging. In this paper, we propose a novel method for fabricating shape-controlled 3D tissues free of non-natural materials using a flexible high-porosity porous structure (HPPS). The HPPS consisted of a micromesh with pore sizes of 14.87 ± 1.83 µm, lattice widths of 2.24 ± 0.10 µm, thicknesses of 9.96 ± 0.92 µm, porosity of 69.06 ± 3.30%, and an I-shaped microchamber of depth 555.26 ± 11.17 µm. U-87 human glioma cells were cultured in an I-shaped HPPS microchamber for 48 h. After cultivation, the 3D tissue was released within a few seconds while maintaining its I-shape. Specific chemicals, such as proteolytic enzymes, were not used. Moreover, the viability of the released cells composed of shape-controlled 3D tissues free of non-natural materials was above 90%. Therefore, the proposed fabrication method is recommended for shape-controlled 3D tissues free of non-natural materials without applying significant stresses to the cells.

Area-Selective Growth of Zinc Oxide Nanowire Arrays for Piezoelectric Energy Harvesting.

In this work, we present the area-selective growth of zinc oxide nanowire (NW) arrays on patterned surfaces of a silicon (Si) substrate for a piezoelectric nanogenerator (PENG). ZnO NW arrays were selectively grown on patterned surfaces of a Si substrate using a devised microelectromechanical system (MEMS)-compatible chemical bath deposition (CBD) method. The fabricated devices measured a maximum peak output voltage of ~7.9 mV when a mass of 91.5 g was repeatedly manually placed on them. Finite element modeling (FEM) of a single NW using COMSOL Multiphysics at an applied axial force of 0.9 nN, which corresponded to the experimental condition, resulted in a voltage potential of -6.5 mV. The process repeated with the same pattern design using a layer of SU-8 polymer on the NWs yielded a much higher maximum peak output voltage of ~21.6 mV and a corresponding peak power density of 0.22 µW/cm3, independent of the size of the NW array. The mean values of the measured output voltage and FEM showed good agreement and a nearly linear dependence on the applied force on a 3 × 3 µm2 NW array area in the range of 20 to 90 nN.

Printing MEMS: Application of Inkjet Techniques to the Manufacturing of Inertial Accelerometers.

In the last few years, the manufacturing of microelectromechanical systems (MEMS) by means of innovative tridimensional and bidimensional printing technologies has significantly catalyzed the attention of researchers. Inkjet material deposition, in particular, can become a key enabling technology for the production of polymer-based inertial sensors characterized by low cost, high manufacturing scalability and superior sensitivity. In this paper, a fully inkjet-printed polymeric accelerometer is proposed, and its manufacturing steps are described. The manufacturing challenges connected with the inkjet deposition of SU-8 as a structural material are identified and addressed, resulting in the production of a functional spring-mass sensor. A step-crosslinking process allows optimization of the final shape of the device and limits defects typical of inkjet printing. The resulting device is characterized from a morphological point of view, and its functionality is assessed in performing optical readout. The acceleration range of the optimized device is 0-0.7 g, its resolution is 2 × 10-3 g and its sensitivity is 6745 nm/g. In general, the work demonstrates the feasibility of polymeric accelerometer production via inkjet printing, and these characteristic parameters demonstrate their potential applicability in a broad range of uses requiring highly accurate acceleration measurements over small displacements.

Detailed Study of the Correlation between Cross-Linking of Thick SU-8 and UV-NIR Optical Transmission/Photoluminescence Spectroscopy.

SU-8 polymers are promising materials for various applications due to their low cost, excellent thermal stability, and outstanding mechanical properties. Cross-linking of SU-8 is a crucial process that determines the properties of the materials. This study investigates the effect of cross-linking of free-standing SU-8 films on optical transmission and PL emission under various curing conditions. Our findings show that an increase in the cross-linking density reduces optical transmission and causes a red shift of the PL emission band peaks. By directly measuring the optical response of the isolated SU-8, we remove any uncertainty due to the substrate's presence. Moreover, we show that optical transmission and PL spectroscopy are two non-distractive techniques that can be employed to monitor the curing of the SU-8. This finding enhances our understanding of the cross-linking process in SU-8 and paves the way to further enhance the properties of the SU-8 polymer for various electronics and optoelectronics applications.

Robustness of antiadhesion between nanofibers and surfaces covered with nanoripples of varying spatial period.

Since nanofibers have a high surface-to-volume ratio, van der Waals forces render them attracted to virtually any surface. The high ratio provides significant advantages for applications in drug delivery, wound healing, tissue regeneration, and filtration. Cribellate spiders integrate thousands of nanofibers into their capture threads as an adhesive to immobilize their prey. These spiders have antiadhesive nanoripples on the calamistrum, a comb-like structure on their hindmost legs, and are thus an ideal model for investigating how nanofiber adhesion can be reduced. We found that these nanoripples had similar spacing in the cribellate species Uloborus plumipes, Amaurobius similis, and Menneus superciliosus, independent of phylogenetic relation and size. Ripple spacing on other body parts (i.e., cuticle, claws, and spinnerets), however, was less homogeneous. To investigate whether a specific distance between the ripples determines antiadhesion, we fabricated nanorippled foils by nanosecond UV laser processing. We varied the spatial periods of the nanoripples in the range ~203-613 nm. Using two different pulse numbers resulted in ripples of different heights. The antiadhesion was measured for all surfaces, showing that the effect is robust against alterations across the whole range of spatial periods tested. Motivated by these results, we fabricated irregular surface nanoripples with spacing in the range ~130-480 nm, which showed the same antiadhesive behavior. The tested surfaces may be useful in tools for handling nanofibers such as spoolers for single nanofibers, conveyor belts for producing endless nanofiber nonwoven, and cylindrical tools for fabricating tubular nanofiber nonwoven. Engineered fibers such as carbon nanotubes represent a further candidate application area.

Optimizing the fabrication of a 3D high-resolution implant for neural stimulation.

BACKGROUND: Tissue-integrated micro-electronic devices for neural stimulation hold great potential in restoring the functionality of degenerated organs, specifically, retinal prostheses, which are aimed at vision restoration. The fabrication process of 3D polymer-metal devices with high resolution and a high aspect-ratio (AR) is very complex and faces many challenges that impair its functionality. APPROACH: Here we describe the optimization of the fabrication process of a bio-functionalized 3D high-resolution 1mm circular subretinal implant composed of SU-8 polymer integrated with dense gold microelectrodes (23µm pitch) passivated with 3D micro-well-like structures (20µm diameter, 3µm resolution). The main challenges were overcome by step-by-step planning and optimization while utilizing a two-step bi-layer lift-off process; bio-functionalization was carried out by N2 plasma treatment and the addition of a bio-adhesion molecule. MAIN RESULTS: In-vitro and in-vivo investigations, including SEM and FIB cross section examinations, revealed a good structural design, as well as a good long-term integration of the device in the rat sub-retinal space and cell migration into the wells. Moreover, the feasibility of subretinal neural stimulation using the fabricated device was demonstrated in-vitro by electrical activation of rat's retina. CONCLUSIONS: The reported process and optimization steps described here in detail can aid in designing and fabricating retinal prosthetic devices or similar neural implants.

Fabrication of High Aspect Ratio Nano-Channels by Thermal Nano-Imprinting and Parylene Deposition.

A low-cost method of fabrication of high aspect ratio nano-channels by thermal nano-imprinting and Parylene deposition is proposed. SU-8 photoresist nano-channels were first manufactured by thermal nano-imprinting, and Parylene deposition was carried out to reduce the width of the nano-channels and increase the aspect ratio. During the process, the side walls of the SU-8 nano-channels were covered with the Parylene film, reducing the width of the nano-channels, and the depth of the channels increased due to the thickness of the Parylene film deposited on the surface of the SU-8 nano-channels, more so than that at the bottom. The influence of Parylene mass on the size of nano-channels was studied by theoretical analysis and experiments, and the deposition pressure of Parylene was optimized. The final high aspect ratio nano-channels are 46 nm in width and 746 nm in depth, of which the aspect ratio is 16. This simple and efficient method paves the way for the production of high aspect ratio nano-channels.

WMS-based near-infrared on-chip acetylene sensor using polymeric SU8 Archimedean spiral waveguide with Euler S-bend.

SU8 is a cost-effective polymer material that is highly suitable for large-scale fabrication of waveguides. However, it has not been employed for on-chip gas measurement utilizing infrared absorption spectroscopy. In this study, we propose a near-infrared on-chip acetylene (C2H2) sensor using SU8 polymer spiral waveguides for the first time to our knowledge. The performance of the sensor based on wavelength modulation spectroscopy (WMS) was experimentally validated. By incorporating the proposed Euler-S bend and Archimedean spiral SU8 waveguide, we achieved a reduction in the sensor's size by over fifty percent. Leveraging the WMS technique, we evaluated the C2H2 sensing performance at 1532.83 nm for SU8 waveguides of lengths 7.4 cm and 13 cm. The limit of detection (LoD) values were 2197.1 ppm (parts per million) and 425.5 ppm, respectively, with an averaging time of 0.2 s. Furthermore, the experimentally obtained optical power confinement factor (PCF) closely approximated the simulated value, with a value of 0.0172 compared to the simulated value of 0.016. The waveguide loss is measured to be 3 dB/cm. The rise time and fall time were approximately 2.05 s and 3.27 s, respectively. This study concludes that the SU8 waveguide exhibits significant potential for high-performance on-chip gas sensing in the near-infrared wavelength range.

Synthesis of Metal/SU-8 Nanocomposites through Photoreduction on SU-8 Substrates.

The paper presents a simple, fast, and cost-effective method for creating metal/SU-8 nanocomposites by applying a metal precursor drop onto the surface or nanostructure of SU-8 and exposing it to UV light. No pre-mixing of the metal precursor with the SU-8 polymer or pre-synthesis of metal nanoparticles is required. A TEM analysis was conducted to confirm the composition and depth distribution of the silver nanoparticles, which penetrate the SU-8 film and uniformly form the Ag/SU-8 nanocomposites. The antibacterial properties of the nanocomposites were evaluated. Moreover, a composite surface with a top layer of gold nanodisks and a bottom layer of Ag/SU-8 nanocomposites was produced using the same photoreduction process with gold and silver precursors, respectively. The reduction parameters can be manipulated to customize the color and spectrum of various composite surfaces.

ZnO NRs/rGO Photocatalyst in a Polymer-Based Microfluidic Platform.

This paper reports the development of ZnO NRs/rGO-based photocatalysts integrated into a tree-branched polymer-based microfluidic reactor for efficient photodegradation of water contaminants. The reactor system includes a photocatalytic reactor, tree-branched microfluidic channels, and ZnO nanorods (NRs) coated with reduced graphene oxide (rGO) on a glass substrate within an area of 0.6 × 0.6 cm2. The ZnO NRs/rGO acts as a photocatalyst layer grown hydrothermally and then spray-coated with rGO. The microfluidic system is made of PDMS and fabricated using soft lithography (micro molding using SU-8 master mold patterned on a silicon wafer). The device geometry is designed using AutoCAD software and the flow properties of the microfluidics are simulated using COMSOL Multiphysics. The microfluidic platform's photocatalytic process aims to bring the nanostructured photocatalyst into very close proximity to the water flow channel, reducing the interaction time and providing effective purification performance. Our functionality test showed that a degradation efficiency of 23.12 %, within the effective residence time of less than 3 s was obtained.

Funnel Devices Based on Asymmetrically Strained Transition Metal Dichalcogenides.

The strain applied to transition metal dichalcogenides (TMDs) reduces their energy bandgap, and local strains result in a funnel-like band structure in which funneled excitons move toward the most strained region. Herein, a funnel device based on asymmetrically strained WS2 and MoS2 is reported. Asymmetric strains are induced by transferring the TMD flakes onto a fork-shaped SU-8 microstructure. Raman and photoluminescence spectra peaks are shifted according to the morphology of the SU-8 microstructure, indicating the application of asymmetric strains to the TMDs. To investigate whether funneled excitons can be converted to electrical currents, various devices are constructed by depositing symmetric and asymmetric electrodes onto the strained TMDs. The scanning photocurrent mapping images follow a fork-shaped pattern, indicating probable conversion of the funneled excitons into electrical currents. In the case of the funnel devices with asymmetric Au and Al electrodes, short-circuit current (ISC ) of WS2 is enhanced by the strains, whereas ISC of MoS2 is suppressed because the Schottky barrier lowers with increasing strain for the MoS2 . These results demonstrate that the funnel devices can be implemented using asymmetrically strained TMDs and the effect of strains on the Schottky barrier is dependent on the TMD used.

Preparation of Highly Stable Polymer Microstructure with Enhanced Adhesion Strength by Pushpin-like Nano/Microstructure Array.

This polymer microstructure expands more available application, which is a milestone for the development of micro-electro-mechanical system devices towards intelligence and multifunction. Poor interface bonding between the polymer and Si or metal is a particular problem, which restricts the application and promotion of polymer materials. In this study, a transition strengthening layer is proposed to obtain a highly stable polymer microstructure by enhancing the interfacial adhesion strength. The transition strengthening layer is activated by a pushpin-like nano/microstructure array with micromachining technology. Given its good graphical qualities and compatibility, epoxy negative photoresist SU-8 is applied to evaluate the strengthened capabilities of the pushpin-like nano/microstructure array. The microstructure of SU-8 is prepared by the same processes, and then the adhesion strength between the SU-8 microstructure and various activated substrates is tested by the thrust tester. It was determined that SU-8 with an activated pushpin-like microstructure array possessed a highly stable adhesion ability, and its adhesion strength increased from 6.51 MPa to 15.42 MPa. With its ultrahigh stable adhesion ability, it has been applied in fabricating three typical microstructures (hollow square microstructure, gradually increasing adjacent periodic microstructure, and slender strip microstructures) and large-area SU-8 microstructures to evaluate the feasibility of the transition strengthening layer and repeatability and universality of the microfabrication processes. The drifting and gluing phenomenon are avoided by this method compared with the traditional design. The proposed pushpin-like nano/microstructure array is promising in enhancing the stability of polymer microstructures with a substrate.

Dielectrophoretically Assembled SWCNTs Networks on SU-8 Substrate for PEG/SWCNTs Composite Gas Sensor.

This study proposed a SU-8 based gas sensor, integrated with heater and sensing electrodes, to develop a multi-channel gas sensor with PEG/SWCNTs composite films. The impedance of single-walled carbon nanotubes (SWCNTs) on each sensing electrode was well controlled via dielectrophoresis technology. To investigate dielectrophoretic mobility characteristics, the concentric circular sensing electrode has three different spacing between the inner and outer electrodes, including 10 µm, 15 µm, and 20 µm. The electrodes were applied with a 5 MHz AC source with a voltage ranging from 1 Vpp to 5 Vpp. Polyethylene glycol (PEG) was deposited on the gas sensor via drop casting. The fabricated gas sensor was operated at different working temperatures, including 25 °C, 40 °C, 50 °C and 60 °C, to examine the sensing response. The response results revealed that the PEG/SWCNTs composites gas sensor with 60 °C working temperature exhibited the ability to detect 80 ppm ethanol vapor.

Fabrication methods for high reflectance dielectric-metal point contact rear mirror for optoelectronic devices.

The patterned dielectric back contact (PDBC) structure can be used to form a point-contact architecture that features a dielectric spacer with spatially distributed, reduced-area metal point contacts between the semiconductor back not recognized contact layer and the metal back contact. In this structure, the dielectric-metal region provides higher reflectance and is electrically insulating. Reduced-area metal point contacts provide electrical conduction for the back contact but typically have lower reflectance. The fabrication methods discussed in this article were developed for thermophotovoltaic cells, but they apply to any III-V optoelectronic device requiring the use of a conductive and highly reflective back contact. Patterned dielectric back contacts may be used for enhanced sub-bandgap reflectance, for enhanced photon recycling near the bandgap energy, or both depending on the optoelectronic application. The following fabrication methods are discussed in the article•PDBC fabrication procedures for spin-on dielectrics and commonly evaporated dielectrics to form the spacer layer.•Methods to selectively etch a parasitically absorbing back contact layer using metal point contacts as an etch mask.•Methods incorporating a dielectric etch through different process techniques such as reactive ion and wet etching.

Aerosol Jet Printing of SU-8 as a Passivation Layer Against Ionic Solutions.

To ensure stability for low-cost electronics used in direct contact with ionic solutions (such as electronic biosensors), electrodes are frequently passivated to protect against current leakage, which leads to corrosion. The epoxy-based polymer SU-8 yields favorable properties for passivation against ionic solutions. However, it is nearly universally patterned via cleanroom techniques, which increases device cost and fabrication complexity. Printing electronic components has been shown to be a viable approach for decreasing fabrication cost. Previous reports on SU-8 printing focus on the resultant printed structure, with little emphasis on its subsequent use as a passivation layer. Here, we demonstrate the printing of SU-8 with an aerosol jet printer using ultrasonic aerosolization. We show that SU-8 can be printed without reformulation, and that printed SU-8 is a viable passivation layer over conductive silver lines, when tested in ionic solutions. Extending the printed SU-8 film beyond the underlying conductive electrodes by 100 µm produced a six order of magnitude decrease in leakage current and resulted high stability over 20 voltage sweeps. Finally, we optimized post-printing cure time to 15 minutes at 160°C, which further minimized leakage current. While the development of low-cost, electronic biosensing devices has increasingly moved towards printing methods, the lack of a printed passivation strategy has hindered this transition. The advancements made in this study towards an aerosol jet printable SU-8 passivation layer provide useful progress towards a fully printed, stable electronic biosensing device.