Ion energy distribution and gas heating in the cathode fall of a direct-current microdischarge.

ABSTRACT

This paper reports on measurements of the ion energy distribution (IED) at the cathode of an argon dc microdischarge using energy-resolved molecular beam mass spectrometry. The measurements are conducted at a fixed pressure-electrode separation product (pd) of 1 cm Torr with a maximum discharge pressure of 20 Torr. The measured IED is compared to the theory of Davis and Vanderslice [W. D. Davis and T. A. Vanderslice, Phys. Rev. 131, 219 (1963)]. A higher pressure in a case of almost constant normalized current densities by pressure (Jp(-2) = 0.080+/-0.006 mA/cm(-2) Torr(-2)) yields a lower ratio of the ion mean free path to the sheath thickness. The results in almost constant Jp(-2) case then indicate that a scaling law of Jp(-2) is no longer applicable for IED of microdischarge. Expected background gaseous temperatures from IEDs with the collisional Child law have reasonable increasing with increased current density (J) in both cases of almost constant Jp(-2) and a constant pressure of 10 Torr. Supported by temperature measurement by laser absorption spectroscopy, it is demonstrated that the expanded theory might be applicable also to microdischarges (Ar approximately 20 Torr) with temperature adjusting.