Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution.
Opt Lett
; 33(5): 518-20, 2008 Mar 01.
Article
em En
| MEDLINE
| ID: mdl-18311311
ABSTRACT
We have demonstrated near-wavelength resolution microscopy in the extreme ultraviolet. Images of 50 nm diameter nanotubes were obtained with a single ~1 ns duration pulse from a desktop-size 46.9 nm laser. We measured the modulation transfer function of the microscope for three different numerical aperture zone plate objectives, demonstrating that 54 nm half-period structures can be resolved. The combination of near-wavelength spatial resolution and high temporal resolution opens myriad opportunities in imaging, such as the ability to directly investigate dynamics of nanoscale structures.
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Base de dados:
MEDLINE
Idioma:
En
Ano de publicação:
2008
Tipo de documento:
Article