A generalized, periodic nonlinearity-reduced interferometer for straightness measurements.

ABSTRACT

Periodic nonlinearity is a systematic error limiting the accuracy of displacement measurements at the nanometer level. However, an interferometer with a displacement measurement accuracy of less than 1 nm is required in nanometrology and in fundamental scientific research. To meet this requirement, a generalized, periodic nonlinearity-reduced interferometer, based on three construction principles has been developed for straightness measurements. These three construction principles have resulted in an interferometer with a highly stable design with reduced periodic nonlinearity. Verifications by a straightness interferometer have demonstrated that the periodic nonlinearity was less than 40 pm. The results also demonstrate that the interferometer design is capable of subnanometer accuracy and is useful in nanometrology.