Planar double-grating microspectrometer.

ABSTRACT

We report on a miniature spectrometer with a volume of 0.135 cm(3) and dimensions of 3x3x11 mm, mounted directly on the surface of a CCD sensor. The spectrometer is formed by two flat diffraction gratings that are designed to perform both the dispersion and imaging functions, eliminating the need for any spherical optics. Two separate parts of the device were fabricated with the single-mask 1 mum lithography on a single glass wafer. The wafer was diced and the device was assembled and directly mounted onto a CCD sensor. The resolution of 3 nm, spectral range of 450 to 750 nm and the optical throughput of ~9% were measured to be in a complete agreement with the model used for the development of the device.