Experimental demonstration of a wafer-level flexible probe for optical waveguide testing.
Opt Express
; 15(24): 16210-5, 2007 Nov 26.
Article
em En
| MEDLINE
| ID: mdl-19550908
ABSTRACT
A flexible optical probe that accomplishes wafer-level directional coupling of light into optical waveguides is investigated theoretically and experimentally. Simulated results indicate high coupling efficiencies in excess of 80% for a range of parameters. Probe fabrication was implemented using SU8 as flexible waveguide material. Coupling of light from flexible probe to an S-shaped test waveguide demonstrated 11% efficiency compared to direct butt coupling. These results may lead to increased yield, shorter development cycles and overall savings in PLC packaging costs.
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Base de dados:
MEDLINE
Idioma:
En
Ano de publicação:
2007
Tipo de documento:
Article