Note: A silicon-on-insulator microelectromechanical systems probe scanner for on-chip atomic force microscopy.

Fowler, Anthony G; Maroufi, Mohammad; Moheimani, S O Reza.

Afiliação

Fowler AG; School of Electrical Engineering and Computer Science, University of Newcastle, Callaghan, NSW 2308, Australia.
Maroufi M; School of Electrical Engineering and Computer Science, University of Newcastle, Callaghan, NSW 2308, Australia.
Moheimani SO; School of Electrical Engineering and Computer Science, University of Newcastle, Callaghan, NSW 2308, Australia.

Rev Sci Instrum ; 86(4): 046107, 2015 Apr.

Article em En | MEDLINE | ID: mdl-25933905

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2015 Tipo de documento: Article

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2015 Tipo de documento: Article