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A miniaturized, high frequency mechanical scanner for high speed atomic force microscope using suspension on dynamically determined points.
Herfst, Rodolf; Dekker, Bert; Witvoet, Gert; Crowcombe, Will; de Lange, Dorus; Sadeghian, Hamed.
Afiliação
  • Herfst R; Department of Optomechatronics, Netherlands Organization for Applied Scientific Research, TNO, Delft, The Netherlands.
  • Dekker B; Department of Optomechatronics, Netherlands Organization for Applied Scientific Research, TNO, Delft, The Netherlands.
  • Witvoet G; Department of Optomechatronics, Netherlands Organization for Applied Scientific Research, TNO, Delft, The Netherlands.
  • Crowcombe W; Department of Optomechatronics, Netherlands Organization for Applied Scientific Research, TNO, Delft, The Netherlands.
  • de Lange D; Department of Optomechatronics, Netherlands Organization for Applied Scientific Research, TNO, Delft, The Netherlands.
  • Sadeghian H; Department of Optomechatronics, Netherlands Organization for Applied Scientific Research, TNO, Delft, The Netherlands.
Rev Sci Instrum ; 86(11): 113703, 2015 Nov.
Article em En | MEDLINE | ID: mdl-26628140
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Texto completo: 1 Base de dados: MEDLINE Assunto principal: Microscopia de Força Atômica / Miniaturização Idioma: En Ano de publicação: 2015 Tipo de documento: Article
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Base de dados: MEDLINE Assunto principal: Microscopia de Força Atômica / Miniaturização Idioma: En Ano de publicação: 2015 Tipo de documento: Article