TEM illumination settings study for optimum spatial resolution and indexing reliability in crystal orientation mappings.

Valery, A; Pofelski, A; Clément, L; Lorut, F; Rauch, E F.

Afiliação

Valery A; STMicroelectronics, 850 Rue Jean Monnet, F-38920 Crolles, France; Univ. Grenoble Alpes, CNRS, SIMAP, F-38000 Grenoble, France. Electronic address: alexia.valery@grenoble-inp.fr.
Pofelski A; STMicroelectronics, 850 Rue Jean Monnet, F-38920 Crolles, France.
Clément L; STMicroelectronics, 850 Rue Jean Monnet, F-38920 Crolles, France.
Lorut F; STMicroelectronics, 850 Rue Jean Monnet, F-38920 Crolles, France.
Rauch EF; Univ. Grenoble Alpes, CNRS, SIMAP, F-38000 Grenoble, France.

Micron ; 92: 43-50, 2017 Jan.

Article em En | MEDLINE | ID: mdl-27866100