50-nm-resolution full-field X-ray microscope without chromatic aberration using total-reflection imaging mirrors.
Sci Rep
; 7: 46358, 2017 04 13.
Article
em En
| MEDLINE
| ID: mdl-28406227
ABSTRACT
X-ray spectromicroscopy with a full-field imaging technique is a powerful method for chemical analysis of heterogeneous complex materials with a nano-scale spatial resolution. For imaging optics, an X-ray reflective optical system has excellent capabilities with highly efficient, achromatic, and long-working-distance properties. An advanced Kirkpatrick-Baez geometry that combines four independent mirrors with elliptic and hyperbolic shapes in both horizontal and vertical directions was developed for this purpose, although the complexity of the system has a limited applicable range. Here, we present an optical system consisting of two monolithic imaging mirrors. Elliptic and hyperbolic shapes were formed on a single substrate to achieve both high resolution and sufficient stability. The mirrors were finished with a ~1-nm shape accuracy using elastic emission machining. The performance was tested at SPring-8 with a photon energy of approximately 10 keV. We could clearly resolve 50-nm features in a Siemens star without chromatic aberration and with high stability over 20 h. We applied this system to X-ray absorption fine structure spectromicroscopy and identified elements and chemical states in specimens of zinc and tungsten micron-size particles.
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Base de dados:
MEDLINE
Assunto principal:
Microanálise por Sonda Eletrônica
/
Desenho de Equipamento
Idioma:
En
Ano de publicação:
2017
Tipo de documento:
Article