Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator.
Micromachines (Basel)
; 9(1)2018 Jan 22.
Article
em En
| MEDLINE
| ID: mdl-30393316
ABSTRACT
Quality factor is one of the most important parameters for a MEMS resonator. Most MEMS resonators are dominated by thermoelastic dissipation (TED). This paper demonstrates that the TED in a disk resonator that is made of (111) single-crystal silicon is surpassed by clamping loss. The stiffness-mass decoupling design method, combined with reducing the beam width, was used to engineer high QTED. Experiments show that Q of the (111) disk resonator have an upper boundary that is determined by the clamping loss caused by the unbalanced out-of-plane displacement. The origin of the out-of-plane displacement is explained by theory and simulation.
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MEDLINE
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En
Ano de publicação:
2018
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Article