Toward High Carrier Mobility and Low Contact Resistance: Laser Cleaning of PMMA Residues on Graphene Surfaces.

Jia, Yuehui; Gong, Xin; Peng, Pei; Wang, Zidong; Tian, Zhongzheng; Ren, Liming; Fu, Yunyi; Zhang, Han.

Afiliação

Jia Y; 1Materials Physics Laboratory, State Key Laboratory for Mesoscopic Physics, School of Physics, Peking University, Beijing, 100871 People's Republic of China.
Gong X; 2Key Laboratory of Microelectronic Devices and Circuits (MOE), Institute of Microelectronics, Peking University, Beijing, 100871 People's Republic of China.
Peng P; 3School of Electronic and Computer Engineering, Peking University Shenzhen Graduate School, Shenzhen, 518055 People's Republic of China.
Wang Z; 2Key Laboratory of Microelectronic Devices and Circuits (MOE), Institute of Microelectronics, Peking University, Beijing, 100871 People's Republic of China.
Tian Z; 2Key Laboratory of Microelectronic Devices and Circuits (MOE), Institute of Microelectronics, Peking University, Beijing, 100871 People's Republic of China.
Ren L; 2Key Laboratory of Microelectronic Devices and Circuits (MOE), Institute of Microelectronics, Peking University, Beijing, 100871 People's Republic of China.
Fu Y; 2Key Laboratory of Microelectronic Devices and Circuits (MOE), Institute of Microelectronics, Peking University, Beijing, 100871 People's Republic of China.
Zhang H; 2Key Laboratory of Microelectronic Devices and Circuits (MOE), Institute of Microelectronics, Peking University, Beijing, 100871 People's Republic of China.

Nanomicro Lett ; 8(4): 336-346, 2016.

Article em En | MEDLINE | ID: mdl-30460292