All-Inorganic Flexible Embedded Thin-Film Capacitors for Dielectric Energy Storage with High Performance.

Liang, Zhongshuai; Liu, Ming; Shen, Lvkang; Lu, Lu; Ma, Chunrui; Lu, Xiaoli; Lou, Xiaojie; Jia, Chun-Lin.

Afiliação

Liang Z; School of Microelectronics , Xi'an Jiaotong University , Xi'an 710049 , China.
Liu M; State Key Laboratory for Mechanical Behavior of Materials and School of Materials Science and Engineering , Xi'an Jiaotong University , Xi'an 710049 , China.
Shen L; School of Microelectronics , Xi'an Jiaotong University , Xi'an 710049 , China.
Lu L; State Key Laboratory for Mechanical Behavior of Materials and School of Materials Science and Engineering , Xi'an Jiaotong University , Xi'an 710049 , China.
Ma C; School of Microelectronics , Xi'an Jiaotong University , Xi'an 710049 , China.
Lu X; State Key Laboratory for Mechanical Behavior of Materials and School of Materials Science and Engineering , Xi'an Jiaotong University , Xi'an 710049 , China.
Lou X; School of Microelectronics , Xi'an Jiaotong University , Xi'an 710049 , China.
Jia CL; State Key Laboratory for Mechanical Behavior of Materials and School of Materials Science and Engineering , Xi'an Jiaotong University , Xi'an 710049 , China.

ACS Appl Mater Interfaces ; 11(5): 5247-5255, 2019 Feb 06.

Article em En | MEDLINE | ID: mdl-30640435