Fabrication of tungsten tip probes within 3 s by using flame etching.

Yamaguchi, Takayuki; Inami, Eiichi; Goto, Yuto; Sakai, Yuta; Sasaki, Satoru; Ohno, Teruaki; Yamada, Toyo Kazu.

Afiliação

Yamaguchi T; Department of Materials Science, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba 263-8522, Japan.
Inami E; Department of Materials Science, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba 263-8522, Japan.
Goto Y; Department of Materials Science, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba 263-8522, Japan.
Sakai Y; Department of Materials Science, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba 263-8522, Japan.
Sasaki S; Department of Materials Science, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba 263-8522, Japan.
Ohno T; Technex Lab Co. Ltd., 8-4-4, Naruse Machida-shi, Tokyo 194-0044, Japan.
Yamada TK; Department of Materials Science, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba 263-8522, Japan.

Rev Sci Instrum ; 90(6): 063701, 2019 Jun.

Article em En | MEDLINE | ID: mdl-31254980

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2019 Tipo de documento: Article

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2019 Tipo de documento: Article