45-degree curved micro-mirror for vertical optical I/O of silicon photonics chip.
Opt Express
; 27(14): 19749-19757, 2019 Jul 08.
Article
em En
| MEDLINE
| ID: mdl-31503730
ABSTRACT
The broadband vertical optical inputs/outputs (I/Os) of silicon (Si) photonics pose significant challenges in terms of practical applications. Herein, we worked on a vertical optical I/O using a 45° curved micro-mirror. To verify the optical coupling characteristics, a simulation was conducted. As a result, efficient broadband optical coupling with various types of single-mode optical fibers was obtained owing to its lens function. An integration technology of the curved mirror was also developed based on the semiconductor manufacturing process. A curved micro-mirror with a spherical surface was obtained, and the vertical optical I/O with its lens function was demonstrated experimentally.
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MEDLINE
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2019
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Article