Assessing the benefits of customizable ion-beam profiles for homogeneously coating or treating the surfaces of non-planar substrates.

Becker, Martin; Li, Xingda; Henning, Torsten; Klar, Peter J.

Afiliação

Becker M; Institute of Experimental Physics I, Justus Liebig University Giessen, Heinrich-Buff-Ring 16, Giessen, Germany.
Li X; Institute of Experimental Physics I, Justus Liebig University Giessen, Heinrich-Buff-Ring 16, Giessen, Germany.
Henning T; Institute of Experimental Physics I, Justus Liebig University Giessen, Heinrich-Buff-Ring 16, Giessen, Germany.
Klar PJ; Institute of Experimental Physics I, Justus Liebig University Giessen, Heinrich-Buff-Ring 16, Giessen, Germany.

Rev Sci Instrum ; 91(1): 013905, 2020 Jan 01.

Article em En | MEDLINE | ID: mdl-32012588

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2020 Tipo de documento: Article

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2020 Tipo de documento: Article