Selective growth of platinum nanolines by helium ion beam induced deposition and atomic layer deposition.

Yang, Po-Shuan; Huang, Zheng-da; Huang, Kuei-Wen; Chen, Miin-Jang.

Afiliação

Yang PS; Department of Materials Science and Engineering National Taiwan University, Roosevelt Road, Sec. 4, Taipei, Taiwan 106, ROC.
Huang ZD; Department of Materials Science and Engineering National Taiwan University, Roosevelt Road, Sec. 4, Taipei, Taiwan 106, ROC.
Huang KW; Department of Materials Science and Engineering National Taiwan University, Roosevelt Road, Sec. 4, Taipei, Taiwan 106, ROC.
Chen MJ; Department of Materials Science and Engineering National Taiwan University, Roosevelt Road, Sec. 4, Taipei, Taiwan 106, ROC. Electronic address: mjchen@ntu.edu.tw.

Ultramicroscopy ; 211: 112952, 2020 Apr.

Article em En | MEDLINE | ID: mdl-32044708