Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force.

Ruan, Zhihu; Ding, Xukai; Qin, Zhengcheng; Jia, Jia; Li, Hongsheng.

Afiliação

Ruan Z; School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China.
Ding X; Key Laboratory of Micro-Inertial Instruments and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China.
Qin Z; School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China.
Jia J; Key Laboratory of Micro-Inertial Instruments and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China.
Li H; School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China.

Micromachines (Basel) ; 11(2)2020 Feb 18.

Article em En | MEDLINE | ID: mdl-32085518

Palavras-chave

MEMS (Micro-electromechanical Systems) disk resonator gyroscope; electrostatic negative stiffness effect; frequency split; mode-matching; virtual Coriolis force

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2020 Tipo de documento: Article

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2020 Tipo de documento: Article