Broadband THz Absorption of Microbolometer Array Integrated with Split-Ring Resonators.
Nanoscale Res Lett
; 15(1): 223, 2020 Dec 03.
Article
em En
| MEDLINE
| ID: mdl-33270179
ABSTRACT
In this paper, a periodic structure based on metallic split-ring resonators is integrated into micro-bridge structures of THz microbolometer array to achieve high THz wave absorption in a wide frequency range. With a small unit size of 35 µm × 35 µm, the effect of split-ring structure on THz wave absorption characteristics of the multilayer structure array is studied to manipulate the resonance absorption frequencies. The absorption bandwidth is effectively increased by integrating a combined structure of split-ring and metallic disk. Broadband THz absorption is formed by coupling the absorption peaks of different structures. The periodic structure of dual-ring combined with a metallic disk provides a broadband THz wave absorption in the range of 4-7 THz. The highest absorption in the band reaches 90% and the lowest absorption is higher than 40%. The designed structure is process-compatible and easy to implement for small-pixel THz microbolometers with high absorption in a wide spectrum range. The research provides a scheme for broadband THz sensing and real-time imaging at room temperature.
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MEDLINE
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En
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2020
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Article