Double-Deck Metal Solenoids 3D Integrated in Silicon Wafer for Kinetic Energy Harvester.

Wang, Nianying; Han, Ruofeng; Chen, Changnan; Gu, Jiebin; Li, Xinxin.

Afiliação

Wang N; State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Han R; School of Information Science and Technology, ShanghaiTech University, Shanghai 201210, China.
Chen C; Chinese Academy of Sciences, Beijing 100049, China.
Gu J; State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Li X; Chinese Academy of Sciences, Beijing 100049, China.

Micromachines (Basel) ; 12(1)2021 Jan 12.

Article em En | MEDLINE | ID: mdl-33445444

Palavras-chave

MEMS technology; double-deck 3D metal solenoids; electromagnetic electricity generation; kinetic energy harvester; micro-casting technology; wafer-level fabrication

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2021 Tipo de documento: Article

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2021 Tipo de documento: Article