EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging.

de La Rochefoucauld, Ombeline; Dovillaire, Guillaume; Harms, Fabrice; Idir, Mourad; Huang, Lei; Levecq, Xavier; Piponnier, Martin; Zeitoun, Philippe.

Afiliação

de La Rochefoucauld O; Imagine Optic, 18 rue Charles de Gaulle, 91400 Orsay, France.
Dovillaire G; Imagine Optic, 18 rue Charles de Gaulle, 91400 Orsay, France.
Harms F; Imagine Optic, 18 rue Charles de Gaulle, 91400 Orsay, France.
Idir M; Brookhaven National Laboratory, 50 Rutherford Drive, Upton, NY 11973, USA.
Huang L; Brookhaven National Laboratory, 50 Rutherford Drive, Upton, NY 11973, USA.
Levecq X; Imagine Optic, 18 rue Charles de Gaulle, 91400 Orsay, France.
Piponnier M; Imagine Optic, 18 rue Charles de Gaulle, 91400 Orsay, France.
Zeitoun P; Laboratoire d'Optique Appliquée, CNRS, ENSTA Paris, Ecole Polytechnique IP Paris, 91120 Palaiseau, France.

Sensors (Basel) ; 21(3)2021 Jan 28.

Article em En | MEDLINE | ID: mdl-33525501