Temperature Compensation of the MEMS-Based Electrochemical Seismic Sensors.

Xu, Chao; Wang, Junbo; Chen, Deyong; Chen, Jian; Qi, Wenjie; Liu, Bowen; Liang, Tian; She, Xu.

Afiliação

Xu C; State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
Wang J; School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
Chen D; State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
Chen J; School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
Qi W; State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
Liu B; School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
Liang T; State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
She X; School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.

Micromachines (Basel) ; 12(4)2021 Apr 02.

Article em En | MEDLINE | ID: mdl-33918243