Ultra-thin Si-padded Si3N4 waveguides for low-loss photonics.
Opt Lett
; 46(14): 3408-3411, 2021 Jul 15.
Article
em En
| MEDLINE
| ID: mdl-34264225
ABSTRACT
We proposed an ultra-thin Si-padded Si3N4 waveguide consisting of a very thin Si slab underneath a Si3N4 strip separated by a SiO2 layer. The Si slab and the Si3N4 strip form a hybrid waveguide mode, where the mode field is confined in these two structures. The measured waveguide propagation loss is 0.055 dB/cm, and the bending loss is 0.09 dB per 90° bend, depending on the bending radius. Because part of the waveguide mode is distributed in the Si slab, this waveguide structure has potential for implementing low-loss and high-speed photonic integrated circuits.
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MEDLINE
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2021
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Article