MEMS-Based Integrated Triaxial Electrochemical Seismometer.

Qi, Wenjie; Liu, Bowen; Liang, Tian; Chen, Jian; Chen, Deyong; Wang, Junbo.

Afiliação

Qi W; State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
Liu B; School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
Liang T; State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
Chen J; School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
Chen D; State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
Wang J; School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.

Micromachines (Basel) ; 12(10)2021 Sep 26.

Article em En | MEDLINE | ID: mdl-34683207