Miniaturized thermal acoustic gas sensor based on a CMOS microhotplate and MEMS microphone.

Hopper, Richard; Popa, Daniel; Udrea, Florin; Ali, Syed Zeeshan; Stanley-Marbell, Phillip.

Afiliação

Hopper R; Department of Engineering, University of Cambridge, Cambridge, CB3 0FA, UK. rhh39@cam.ac.uk.
Popa D; Department of Engineering, University of Cambridge, Cambridge, CB3 0FA, UK.
Udrea F; Department of Engineering, University of Cambridge, Cambridge, CB3 0FA, UK.
Ali SZ; Flusso Limited, Cambridge, CB4 0DL, UK.
Stanley-Marbell P; Department of Engineering, University of Cambridge, Cambridge, CB3 0FA, UK.

Sci Rep ; 12(1): 1690, 2022 02 01.

Article em En | MEDLINE | ID: mdl-35105901

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2022 Tipo de documento: Article

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2022 Tipo de documento: Article