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Comparison of ZnO, Al2O3, AlZnO, and Al2O3-Doped ZnO Sensing Membrane Applied in Electrolyte-Insulator-Semiconductor Structures.
Kao, Chyuan-Haur; Liu, Yi-Wen; Kuo, Chih-Chen; Chan, Shih-Ming; Wang, Deng-Yi; Lin, Ya-Hsuan; Lee, Ming-Ling; Chen, Hsiang.
Afiliação
  • Kao CH; Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan District, Taoyuan City 333, Taiwan.
  • Liu YW; Kidney Research Center, Department of Nephrology, Chang Gung Memorial Hospital, Chang Gung University, No. 5, Fuxing St., Guishan Township, Taoyuan City 333, Taiwan.
  • Kuo CC; Department of Electronic Engineering, Ming Chi University of Technology, 284 Gungjuan Rd., Taishan Dist., New Taipei City 243, Taiwan.
  • Chan SM; Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan District, Taoyuan City 333, Taiwan.
  • Wang DY; Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, No.1, University Rd., Puli 545, Taiwan.
  • Lin YH; Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, No.1, University Rd., Puli 545, Taiwan.
  • Lee ML; Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, No.1, University Rd., Puli 545, Taiwan.
  • Chen H; Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, No.1, University Rd., Puli 545, Taiwan.
Membranes (Basel) ; 12(2)2022 Jan 30.
Article em En | MEDLINE | ID: mdl-35207089
ABSTRACT
In this study, ZnO, AlZnO, Al2O3, and Al2O3-doped ZnO-sensing membranes were fabricated in electrolyte-insulator-semiconductor (EIS) structures. Multiple material analyses indicate that annealing at an appropriate temperature of 500 °C could enhance crystallizations, passivate defects, and facilitate grainizations. Owing to their material properties, both the pH-sensing capability and overall reliability were optimized for these four types of membranes. The results also revealed that higher Al amounts increased the surface roughness values and enhanced larger crystals and grains. Higher Al compositions resulted in higher sensitivity, linearity, and stability in the membrane.
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Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2022 Tipo de documento: Article
Texto completo
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PubMed Links
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Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2022 Tipo de documento: Article