Six-Degree-of-Freedom Posture Measurement Technologies Using Position Sensitive Detectors (PSDs): State of the Art.

Meng, Xiangxu; Sun, Siwei; Yan, Xuetao; Liu, Fengman; Cao, Liqiang; Wang, Qidong; Sun, Yu.

Afiliação

Meng X; System Packaging and Integration Research Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China.
Sun S; School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China.
Yan X; System Packaging and Integration Research Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China.
Liu F; System Packaging and Integration Research Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China.
Cao L; School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China.
Wang Q; System Packaging and Integration Research Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China.
Sun Y; System Packaging and Integration Research Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China.

Micromachines (Basel) ; 13(11)2022 Nov 03.

Article em En | MEDLINE | ID: mdl-36363924