Heteroepitaxial Growth of an Ultrathin ß-Ga<sub>2</sub>O<sub>3</sub> Film on a Sapphire Substrate Using Mist CVD with Fluid Flow Modeling.

Heteroepitaxial Growth of an Ultrathin ß-Ga₂O₃ Film on a Sapphire Substrate Using Mist CVD with Fluid Flow Modeling.

Mondal, Abhay Kumar; Deivasigamani, Revathy; Ping, Loh Kean; Shazni Mohammad Haniff, Muhammad Aniq; Goh, Boon Tong; Horng, Ray Hua; Mohamed, Mohd Ambri.

Afiliação

Mondal AK; Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia (UKM), 43600Bangi, Selangor, Malaysia.
Deivasigamani R; Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia (UKM), 43600Bangi, Selangor, Malaysia.
Ping LK; Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia (UKM), 43600Bangi, Selangor, Malaysia.
Shazni Mohammad Haniff MA; Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia (UKM), 43600Bangi, Selangor, Malaysia.
Goh BT; Low Dimensional Materials Research Centre (LDMRC), Department of Physics, Faculty of Science, University Malaya, 50603Kuala Lumpur, Malaysia.
Horng RH; Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu30010, Taiwan.
Mohamed MA; Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia (UKM), 43600Bangi, Selangor, Malaysia.

ACS Omega ; 7(45): 41236-41245, 2022 Nov 15.

Article em En | MEDLINE | ID: mdl-36406506

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2022 Tipo de documento: Article

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2022 Tipo de documento: Article